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Chawon KOH
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Gyeonggi-do, KR
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,923,209
Issue date
Mar 5, 2024
Samsung Electronics Co., Ltd.
Hyunwoong Hwang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Photoresist compositions and methods for fabricating semiconductor...
Patent number
11,599,021
Issue date
Mar 7, 2023
Samsung Electronics Co., Ltd.
Chawon Koh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Photoresist compositions and methods for fabricating semiconductor...
Patent number
11,327,398
Issue date
May 10, 2022
Samsung Electronics Co., Ltd.
Chawon Koh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate drying method, photoresist developing method, photolithog...
Patent number
11,189,503
Issue date
Nov 30, 2021
Samsung Electronics Co., Ltd.
Young-Hoo Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Photoresist composition for extreme ultraviolet and method of formi...
Patent number
10,353,290
Issue date
Jul 16, 2019
Samsung Electronics Co., Ltd.
Cheol Hong Park
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods of fabricating a semiconductor device
Patent number
9,564,325
Issue date
Feb 7, 2017
Samsung Electronics Co., Ltd.
Chawon Koh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Photo lithographic rinse solution and method of manufacturing a sem...
Patent number
9,158,204
Issue date
Oct 13, 2015
Samsung Electronics Co., Ltd.
Chawon Koh
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
NON-CHEMICALLY AMPLIFIED RESIST COMPOSITION AND METHOD OF MANUFACTU...
Publication number
20240142874
Publication date
May 2, 2024
Samsung Electronics Co., Ltd.
Chawon KOH
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ORGANOMETALLIC COMPOUND COMPRISING A METAL COMBINED WITH AT LEAST O...
Publication number
20230400764
Publication date
Dec 14, 2023
Samsung Electronics Co., Ltd.
Jin-Kyun Lee
C07 - ORGANIC CHEMISTRY
Information
Patent Application
SUBSTRATE PROCESSING METHOD
Publication number
20230314956
Publication date
Oct 5, 2023
Samsung Electronics Co., Ltd.
Sungkun KANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20230076633
Publication date
Mar 9, 2023
Samsung Electronics Co., Ltd.
Sungkun KANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20230033040
Publication date
Feb 2, 2023
Samsung Electronics Co., Ltd.
Hyunwoong HWANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20220299874
Publication date
Sep 22, 2022
INHA-INDUSTRY PARTNERSHIP INSTITUTE
Chawon KOH
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTORESIST COMPOSITIONS AND METHODS FOR FABRICATING SEMICONDUCTOR...
Publication number
20220260906
Publication date
Aug 18, 2022
Samsung Electronics Co., Ltd.
CHAWON KOH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING INTEGRATED CIRCUIT DEVICE USING A METAL-CON...
Publication number
20220059345
Publication date
Feb 24, 2022
Samsung Electronics Co., Ltd.
Chawon Koh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTORESIST COMPOSITIONS
Publication number
20210380612
Publication date
Dec 9, 2021
Samsung Electronics Co., Ltd.
Chawon Koh
C07 - ORGANIC CHEMISTRY
Information
Patent Application
PHOTORESIST COMPOSITIONS AND METHODS FOR FABRICATING SEMICONDUCTOR...
Publication number
20200348594
Publication date
Nov 5, 2020
Samsung Electronics Co., Ltd.
CHAWON KOH
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE DRYING METHOD, PHOTORESIST DEVELOPING METHOD, PHOTOLITHOG...
Publication number
20200152486
Publication date
May 14, 2020
Samsung Electronics Co., Ltd.
Young-Hoo KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTORESIST COMPOSITION FOR EXTREME ULTRAVIOLET AND METHOD OF FORMI...
Publication number
20170010531
Publication date
Jan 12, 2017
Samsung Electronics Co., Ltd.
Cheol Hong PARK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING PHOTOLITHOGRAP...
Publication number
20160026090
Publication date
Jan 28, 2016
Samsung Electronics Co., Ltd.
Chawon KOH
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS OF FABRICATING A SEMICONDUCTOR DEVICE
Publication number
20150104945
Publication date
Apr 16, 2015
Chawon Koh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTO LITHOGRAPHIC RINSE SOLUTION AND METHOD OF MANUFACTURING A SEM...
Publication number
20140045335
Publication date
Feb 13, 2014
Samsung Electronics Co., Ltd.
Chawon KOH
H01 - BASIC ELECTRIC ELEMENTS