Che-Lun FAN

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Taichung City, TW

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Patents Grantslast 30 patents

Information Patent Grant
Etching solution recycling system and method for wafer etching appa...
- Patent number 11,229,856
- Issue date Jan 25, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Che-Lun Fan
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
ETCHING SOLUTION RECYCLING SYSTEM AND METHOD FOR WAFER ETCHING APPA...
- Publication number 20190099694
- Publication date Apr 4, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Che-Lun FAN
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL