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Chee-Thim Loh
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Johor Bahru., MY
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last 30 patents
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Patent Grant
Method for cleaning semiconductor equipment
Patent number
7,931,752
Issue date
Apr 26, 2011
United Microelectronics Corp.
Chong-Tat Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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last 30 patents
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Patent Application
METHOD FOR CLEANING SEMICONDUCTOR EQUIPMENT
Publication number
20100170530
Publication date
Jul 8, 2010
United Microelectronics Corp.
Chong-Tat Lee
B08 - CLEANING