Chen Chen

Person

  • Hayward, CA, US

Patents Applicationslast 30 patents

  • Information Patent Application

    SILICON ETCH WITH ORGANOCHLORIDE

    • Publication number 20240429063
    • Publication date Dec 26, 2024
    • LAM RESEARCH CORPORATION
    • Ilya PISKUN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    CONTROL OF MASK CD

    • Publication number 20230230807
    • Publication date Jul 20, 2023
    • LAM RESEARCH CORPORATION
    • Beibei Jiang
    • H01 - BASIC ELECTRIC ELEMENTS