Chen-Chia Chiang

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Zhunan Township, TW

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Patents Grantslast 30 patents

Information Patent Grant
PVD apparatus and method with deposition chamber having multiple ta...
- Patent number 10,190,209
- Issue date Jan 29, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chung-En Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PVD apparatus and method with deposition chamber having multiple ta...
- Patent number 9,708,706
- Issue date Jul 18, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chung-En Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Closed loop control for reliability
- Patent number 9,026,241
- Issue date May 5, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen-Cheng Yang
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
PVD APPARATUS AND METHOD WITH DEPOSITION CHAMBER HAVING MULTIPLE TA...
- Publication number 20170314121
- Publication date Nov 2, 2017
- Taiwan Semiconductor Manufacturing Co., LTD
- Chung-En Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NOVEL CLOSED LOOP CONTROL FOR RELIABILITY
- Publication number 20130226327
- Publication date Aug 29, 2013
- Taiwan Semiconductor Manufacturing Co., LTD
- Wen-Cheng Yang
- G05 - CONTROLLING REGULATING
Information Patent Application
APPARATUS AND METHOD WITH DEPOSITION CHAMBER HAVING MULTIPLE TARGET...
- Publication number 20130136873
- Publication date May 30, 2013
- Taiwan Semiconductor Manufacturing Co., LTD
- Chung-En KAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...