Chen-Chun Yan

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Zhubei City, TW

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Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for fixed focus ring processing
- Patent number 10,950,483
- Issue date Mar 16, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Huan-Lisng Tzeng
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS FOR FIXED FOCUS RING PROCESSING
- Publication number 20210202295
- Publication date Jul 1, 2021
- Taiwan Semiconductor Manufacturing Co., LTD
- Huan-Lisng TZENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BAFFLE PLATE FOR CONTROLLING WAFER UNIFORMITY AND METHODS FOR MAKIN...
- Publication number 20200075294
- Publication date Mar 5, 2020
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Jr-Sheng CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICES AND METHODS FOR CONTROLLING WAFER UNIFORMITY IN PLASMA-BASE...
- Publication number 20200043705
- Publication date Feb 6, 2020
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Jr-Sheng CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR FIXED FOCUS RING PROCESSING
- Publication number 20190164804
- Publication date May 30, 2019
- Taiwan Semiconductor Manufacturing Co., LTD
- Huan-Lisng TZENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...