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last 30 patents
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Patent Grant
Induction coil assembly and reaction chamber
Patent number
11,626,268
Issue date
Apr 11, 2023
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Chen Niu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
UPPER ELECTRODE MECHANISM, CURRENT CONTROL METHOD FOR RADIO FREQUEN...
Publication number
20230197407
Publication date
Jun 22, 2023
Beijing NAURA Microelectronics Equipment Co., Ltd.
Jing WEI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INDUCTION COIL ASSEMBLY AND REACTION CHAMBER
Publication number
20210375587
Publication date
Dec 2, 2021
Beijing NAURA Microelectronics Equipment Co., Ltd.
Chen NIU
H01 - BASIC ELECTRIC ELEMENTS