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Chen Pin Hsu
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Tokyo, JP
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Patents Grants
last 30 patents
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Patent Grant
Plasma processing apparatus
Patent number
12,002,655
Issue date
Jun 4, 2024
HITACHI HIGH-TECH CORPORATION
Chen Pin Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
11,948,776
Issue date
Apr 2, 2024
HITACHI HIGH-TECH CORPORATION
Chen Pin Hsu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
VACUUM PROCESSING APPARATUS
Publication number
20240297058
Publication date
Sep 5, 2024
Hitachi High-Tech Corporation
Chen Pin HSU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20230352273
Publication date
Nov 2, 2023
Hitachi High-Tech Corporation
Chen Pin Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20230352274
Publication date
Nov 2, 2023
Hitachi High-Tech Corporation
Hitoshi Tamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20220344132
Publication date
Oct 27, 2022
Hitachi High-Tech Corporation
Chen Pin Hsu
H01 - BASIC ELECTRIC ELEMENTS