Chen-Sho Shey

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TaiNan, TW

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Patents Grantslast 30 patents

Information Patent Grant
System of angular displacement control for micro-mirrors
- Patent number 6,577,431
- Issue date Jun 10, 2003
- Industrial Technology Research Institute
- Cheng-Tang Pan
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
System of angular displacement control for micro-mirrors
- Publication number 20020191272
- Publication date Dec 19, 2002
- INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Cheng-Tang Pan
- B81 - MICRO-STRUCTURAL TECHNOLOGY