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Patents Grants
last 30 patents
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Patent Grant
Silicon carbide-based combined temperature-pressure micro-electro-m...
Patent number
11,686,637
Issue date
Jun 27, 2023
Xi'an Jiaotong University
Xudong Fang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
ALL-SILICON CARBIDE (SiC) ACCELERATION-PRESSURE INTEGRATED SENSOR C...
Publication number
20250236507
Publication date
Jul 24, 2025
XI'AN JIAOTONG UNIVERSITY
Xudong FANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SILICON CARBIDE-BASED COMBINED TEMPERATURE-PRESSURE MICRO-ELECTRO-M...
Publication number
20220146352
Publication date
May 12, 2022
XI'AN JIAOTONG UNIVERSITY
Xudong FANG
B81 - MICRO-STRUCTURAL TECHNOLOGY