Chen-Yuan Hsia

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Hsin-Chu, TW

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Patents Grantslast 30 patents

Information Patent Grant
System and method for removing particles in semiconductor manufactu...
- Patent number 8,046,860
- Issue date Nov 1, 2011
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Yuan Hsia
- B08 - CLEANING
Information Patent Grant
System and method for removing particles in semiconductor manufactu...
- Patent number 7,819,980
- Issue date Oct 26, 2010
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Yuan Hsia
- B08 - CLEANING
Information Patent Grant
Dimension monitoring method and system
- Patent number 7,460,251
- Issue date Dec 2, 2008
- Taiwan Semiconductor Manufacturing Co.
- Shih-Ming Chang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR REMOVING PARTICLES IN SEMICONDUCTOR MANUFACTU...
- Publication number 20110005010
- Publication date Jan 13, 2011
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Yuan Hsia
- B08 - CLEANING
Information Patent Application
Dimension monitoring method and system
- Publication number 20070075037
- Publication date Apr 5, 2007
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shih-Ming Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System and method for removing particles in semiconductor manufactu...
- Publication number 20070039631
- Publication date Feb 22, 2007
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Yuan Hsia
- B08 - CLEANING