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Kaohsiung, TW
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last 30 patents
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Patent Grant
Damascene method employing multi-layer etch stop layer
Patent number
6,734,116
Issue date
May 11, 2004
Taiwan Semiconductor Manufacturing Co., Ltd
Cheng-Cheng Guo
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Damascene method employing multi-layer etch stop layer
Publication number
20030134521
Publication date
Jul 17, 2003
Taiwan Semiconductor Manufacturing Co., Ltd.
Cheng-Cheng Guo
H01 - BASIC ELECTRIC ELEMENTS