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Cheng-Chuan Lee
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Fenyuan Township, TW
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Patents Grants
last 30 patents
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Patent Grant
Control system for multi-layer chemical mechanical polishing proces...
Patent number
7,259,097
Issue date
Aug 21, 2007
United Microelectronics Corp.
Ming-Hsin Yeh
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
Complex CMP process and fabricating methods of STI structure and in...
Publication number
20070062910
Publication date
Mar 22, 2007
Ming-Hsin Yeh
B24 - GRINDING POLISHING
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Patent Application
Control system for multi-layer chemical mechanical polishing proces...
Publication number
20070062819
Publication date
Mar 22, 2007
Ming-Hsin Yeh
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR