Cheng-Chung Lim

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Singapore, SG

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Patents Grantslast 30 patents

Information Patent Grant
Buffer apparatus and thin film deposition system
- Patent number 8,328,938
- Issue date Dec 11, 2012
- United Microelectronics Corp.
- Cheng-Chung Lim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of cleaning turbo pump and chamber/turbo pump clean process
- Patent number 8,277,567
- Issue date Oct 2, 2012
- United Microelectronics Corp.
- Kian-Soong Poh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of cleaning turbo pump and chamber/turbo pump clean process
- Patent number 8,021,492
- Issue date Sep 20, 2011
- United Microelectronics Corp.
- Kian-Soong Poh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF CLEANING TURBO PUMP AND CHAMBER/TURBO PUMP CLEAN PROCESS
- Publication number 20110284035
- Publication date Nov 24, 2011
- United Microelectronics Corp.
- Kian-Soong Poh
- B08 - CLEANING
Information Patent Application
BUFFER APPARATUS AND THIN FILM DEPOSITION SYSTEM
- Publication number 20100043701
- Publication date Feb 25, 2010
- United Microelectronics Corp.
- Cheng-Chung Lim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF CLEANING TURBO PUMP AND CHAMBER/TURBO PUMP CLEAN PROCESS
- Publication number 20080295867
- Publication date Dec 4, 2008
- United Microelectronics Corp.
- Kian-Soong Poh
- B08 - CLEANING
Information Patent Application
CLEAN METHOD FOR VAPOR DEPOSITION PROCESS
- Publication number 20080260946
- Publication date Oct 23, 2008
- United Microelectronics Corp.
- Hwee-Leong Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...