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Patents Grants
last 30 patents
Information
Patent Grant
Plasma doping method with gate shutter
Patent number
8,652,953
Issue date
Feb 18, 2014
Panasonic Corporation
Tomohiro Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma doping device with gate shutter
Patent number
8,257,501
Issue date
Sep 4, 2012
Panasonic Corporation
Tomohiro Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for introducing impurities and apparatus for introducing imp...
Patent number
8,222,128
Issue date
Jul 17, 2012
Panasonic Corporation
Yuichiro Sasaki
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Impurity introducing apparatus having feedback mechanism using opti...
Patent number
8,138,582
Issue date
Mar 20, 2012
Panasonic Corporation
Cheng-Guo Jin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma doping method and apparatus
Patent number
8,129,202
Issue date
Mar 6, 2012
Panasonic Corporation
Tomohiro Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for making junction and processed material formed using the...
Patent number
7,981,779
Issue date
Jul 19, 2011
Panasonic Corporation
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for fabricating semiconductor device
Patent number
7,932,185
Issue date
Apr 26, 2011
Sumitomo Heavy Industries, Ltd.
Toshio Kudo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method and plasma processing apparatus
Patent number
7,858,155
Issue date
Dec 28, 2010
Panasonic Corporation
Tomohiro Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus of fabricating semiconductor device
Patent number
7,858,479
Issue date
Dec 28, 2010
Panasonic Corporation
Bunji Mizuno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming impurity-introduced layer, method for cleaning o...
Patent number
7,759,254
Issue date
Jul 20, 2010
Panasonic Corporation
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for introducing impurities and apparatus for introducing imp...
Patent number
7,741,199
Issue date
Jun 22, 2010
Panasonic Corporation
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for introducing impurities and apparatus for introducing imp...
Patent number
7,709,362
Issue date
May 4, 2010
Panasonic Corporation
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Impurity introducing method using optical characteristics to determ...
Patent number
7,700,382
Issue date
Apr 20, 2010
Panasonic Corporation
Cheng-Guo Jin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for introduction impurities and apparatus for introducing im...
Patent number
7,696,072
Issue date
Apr 13, 2010
Panasonic Corporation
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Impurity introducing apparatus and impurity introducing method
Patent number
7,626,184
Issue date
Dec 1, 2009
Panasonic Corporation
Bunji Mizuno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Impurity introducing apparatus and impurity introducing method
Patent number
7,622,725
Issue date
Nov 24, 2009
Panaosnic Corporation
Bunji Mizuno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for introducing impurities and apparatus for introducing imp...
Patent number
7,618,883
Issue date
Nov 17, 2009
Panasonic Corporation
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for plasma processing
Patent number
7,601,619
Issue date
Oct 13, 2009
Panasonic Corporation
Tomohiro Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of doping impurities, and electronic element using the same
Patent number
7,582,492
Issue date
Sep 1, 2009
Panasonic Corporation
Cheng-Guo Jin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for introducing impurities
Patent number
7,456,085
Issue date
Nov 25, 2008
Panasonic Corporation
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PLASMA DOPING METHOD AND APPARATUS
Publication number
20130323916
Publication date
Dec 5, 2013
PANASONIC CORPORATION
Tomohiro Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA DOPING METHOD WITH GATE SHUTTER
Publication number
20120285818
Publication date
Nov 15, 2012
PANASONIC CORPORATION
Tomohiro Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA DOPING METHOD AND APPARATUS
Publication number
20120186519
Publication date
Jul 26, 2012
PANASONIC CORPORATION
Tomohiro Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MAKING JUNCTION AND PROCESSED MATERIAL FORMED USING THE...
Publication number
20110237056
Publication date
Sep 29, 2011
PANASONIC CORPORATION
Yuichiro SASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR INTRODUCING IMPURITIES AND APPARATUS FOR INTRODUCING IMP...
Publication number
20100167508
Publication date
Jul 1, 2010
PANASONIC CORPORATION
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IMPURITY INTRODUCING METHOD USING OPTICAL CHARACTERISTICS TO DETERM...
Publication number
20100148323
Publication date
Jun 17, 2010
PANASONIC CORPORATION
Cheng-Guo Jin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA DOPING METHOD AND APPARATUS
Publication number
20100098837
Publication date
Apr 22, 2010
PANASONIC CORPORATION
Tomohiro Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA DOPING METHOD AND APPARATUS
Publication number
20100009469
Publication date
Jan 14, 2010
Takayuki Kai
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Plasma Doping Method and Apparatus
Publication number
20090233383
Publication date
Sep 17, 2009
Tomohiro Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma Doping Method and Apparatus
Publication number
20090181526
Publication date
Jul 16, 2009
Tomohiro Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma Doping Method and Plasma Processing Device
Publication number
20090176355
Publication date
Jul 9, 2009
PANASONIC CORPORATION
Tomohiro Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Impurity Introducing Apparatus and Impurity Introducing Method
Publication number
20090140174
Publication date
Jun 4, 2009
PANASONIC CORPORATION
Bunji Mizuno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Asher, Ashing Method and Impurity Doping Apparatus
Publication number
20090104783
Publication date
Apr 23, 2009
Cheng-Guo Jin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and Apparatus for Plasma Processing
Publication number
20090068769
Publication date
Mar 12, 2009
Tomohiro Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for fabricating semiconductor device
Publication number
20090023262
Publication date
Jan 22, 2009
Cheng-Guo Jin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma Processing Method and Plasma Processing Apparatus
Publication number
20080258082
Publication date
Oct 23, 2008
Tomohiro Okumura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IMPURITY INTRODUCING APPARATUS AND IMPURITY INTRODUCING METHOD
Publication number
20080210167
Publication date
Sep 4, 2008
Matsushita Electric Industrial Co., Ltd.
Bunji Mizino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of Introducing Impurity
Publication number
20080194086
Publication date
Aug 14, 2008
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Impurity Introducing Method, Impurity Introducing Apparatus, and El...
Publication number
20080182348
Publication date
Jul 31, 2008
Cheng-Guo Jin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IMPURITY INTRODUCING APPARATUS AND IMPURITY INTRODUCING METHOD
Publication number
20080166861
Publication date
Jul 10, 2008
Matsushita Electric Industrial Co., Ltd.
Bunji Mizuno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR INTRODUCING IMPURITIES AND APPARATUS FOR INTRODUCING IMP...
Publication number
20080160728
Publication date
Jul 3, 2008
Matsushita Electric Industrial Co., Ltd.
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Introducing Impurities
Publication number
20080146009
Publication date
Jun 19, 2008
Matsushita Electric Industrial Co., Ltd.
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for making junction and processed material formed using the...
Publication number
20080135980
Publication date
Jun 12, 2008
Matsushita Electric Industrial Co., Ltd.
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for introduction impurities and apparatus for introducing im...
Publication number
20080124900
Publication date
May 29, 2008
Matsushita Electric Industrial Co., Ltd.
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of Doping Impurities, and Electronic Element Using the Same
Publication number
20080061292
Publication date
Mar 13, 2008
Cheng-Guo Jin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for introducing impurities and apparatus for introducing imp...
Publication number
20070254460
Publication date
Nov 1, 2007
MATSUSHIDA ELECTRIC INDUSTRIAL CO., LTD.
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method And Apparatus Of Fabricating Semiconductor Device
Publication number
20070212837
Publication date
Sep 13, 2007
Bunji Mizuno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for making junction and processed material formed using the...
Publication number
20070042578
Publication date
Feb 22, 2007
Matsushita Electric Industrial Co., Ltd.
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Process for fabricating semiconductor device
Publication number
20060183350
Publication date
Aug 17, 2006
Sumitomo Heavy Industries, Ltd.
Toshio Kudo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for introducing impurities and apparatus for introducing imp...
Publication number
20050277273
Publication date
Dec 15, 2005
Yuichiro Sasaki
H01 - BASIC ELECTRIC ELEMENTS