Cheng-Nan Kao

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Changhua County, TW

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Patents Grantslast 30 patents

Information Patent Grant
Particle improvement for single wafer apparatus
- Patent number 9,659,794
- Issue date May 23, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ming-Sung Hung
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PARTICLE IMPROVEMENT FOR SINGLE WAFER APPARATUS
- Publication number 20160040286
- Publication date Feb 11, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ming-Sung HUNG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...