Cheng-Qun Gui

Person

Best, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus and method
- Patent number 9,383,195
- Issue date Jul 5, 2016
- ASML Netherlands B.V.
- Wilhelmus Johannes Maria De Laat
- G01 - MEASURING TESTING
Information Patent Grant
Lithographic apparatus, programmable patterning device and lithogra...
- Patent number 9,335,638
- Issue date May 10, 2016
- ASML Netherlands B.V.
- Pieter Willem Herman De Jager
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method
- Patent number 8,982,318
- Issue date Mar 17, 2015
- ASML Netherlands B.V.
- Nikolay Nikolaevich Iosad
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number RE45284
- Issue date Dec 9, 2014
- ASML Netherlands B.V.
- Cheng-Qun Gui
- 355 - Photocopying
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,675,175
- Issue date Mar 18, 2014
- ASML Netherlands B.V.
- Richard Alexander George
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method
- Patent number 8,576,374
- Issue date Nov 5, 2013
- ASML Netherlands B.V.
- Keith Frank Best
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, programmable patterning device and lithogra...
- Patent number 8,531,648
- Issue date Sep 10, 2013
- ASML Netherlands B.V.
- Pieter Willem Herman De Jager
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,502,954
- Issue date Aug 6, 2013
- ASML Netherlands B.V.
- Gustaaf Willem Van Der Feltz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,395,755
- Issue date Mar 12, 2013
- ASML Netherlands B.V.
- Richard Alexander George
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,390,787
- Issue date Mar 5, 2013
- ASML Netherlands B.V.
- Cheng-Qun Gui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method
- Patent number 8,383,325
- Issue date Feb 26, 2013
- ASML Netherlands B.V.
- Nikolay Nikolaevich Iosad
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number RE43515
- Issue date Jul 17, 2012
- ASML Netherlands B.V.
- Cheng-Qun Gui
- 355 - Photocopying
Information Patent Grant
Lithographic method and carrier substrate
- Patent number 8,029,973
- Issue date Oct 4, 2011
- ASML Netherlands B.V.
- Wilhelmus Johannes Maria De Laat
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,911,586
- Issue date Mar 22, 2011
- ASML Netherlands B.V.
- Cheng-Qun Gui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic method and patterning device
- Patent number 7,879,514
- Issue date Feb 1, 2011
- ASML Netherlands B.V.
- Geoffrey Norman Phillipps
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,684,009
- Issue date Mar 23, 2010
- ASML Netherlands B.V.
- Pieter Willem Herman De Jager
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Large field of view projection optical system with aberration corre...
- Patent number 7,643,128
- Issue date Jan 5, 2010
- ASML Holding N.V.
- Robert D. Harned
- G02 - OPTICS
Information Patent Grant
Scanning lithographic apparatus and device manufacturing method
- Patent number 7,609,362
- Issue date Oct 27, 2009
- ASML Netherlands B.V.
- Pieter Willem Herman De Jager
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,576,834
- Issue date Aug 18, 2009
- ASML Netherlands B.V.
- Richard Alexander George
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,567,340
- Issue date Jul 28, 2009
- ASML Netherlands B.V.
- Cheng-Qun Gui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,561,251
- Issue date Jul 14, 2009
- ASML Netherlands B.V.
- Gustaaf Willem Van Der Feltz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist recovery method
- Patent number 7,531,040
- Issue date May 12, 2009
- ASML Holdings N.V.
- Joseph Consolini
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,522,266
- Issue date Apr 21, 2009
- ASML Netherlands B.V.
- Cheng-Qun Gui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical position assessment apparatus and method
- Patent number 7,477,403
- Issue date Jan 13, 2009
- ASML Netherlands B.V.
- Cheng-Qun Gui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for locating and/or forming bumps
- Patent number 7,468,291
- Issue date Dec 23, 2008
- ASML Netherlands B.V.
- Cheng-Qun Gui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic apparatus, device manufacturing method, and substrate...
- Patent number 7,440,081
- Issue date Oct 21, 2008
- ASML Netherlands B.V.
- Cheng-Qun Gui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,428,040
- Issue date Sep 23, 2008
- ASML Netherlands B.V.
- Cheng-Qun Gui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection system for a lithographic apparatus
- Patent number 7,426,076
- Issue date Sep 16, 2008
- ASML Holding N.V.
- Cheng-Qun Gui
- G02 - OPTICS
Information Patent Grant
Large field of view 2X magnification projection optical system for...
- Patent number 7,405,802
- Issue date Jul 29, 2008
- ASML Holding N.V.
- Robert D. Harned
- G02 - OPTICS
Information Patent Grant
Optical position assessment apparatus and method
- Patent number 7,388,663
- Issue date Jun 17, 2008
- ASML Netherlands B.V.
- Cheng-Qun Gui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHIC APPARATUS, PROGRAMMABLE PATTERNING DEVICE AND LITHOGRA...
- Publication number 20140055764
- Publication date Feb 27, 2014
- ASML NETHERLANDS B.V.
- Pieter Willem Herman DE JAGER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus and Device Manufacturing Method
- Publication number 20130201466
- Publication date Aug 8, 2013
- ASML NETHERLANDS B.V.
- Richard Alexander GEORGE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20120281192
- Publication date Nov 8, 2012
- TNO
- Wilhelmus Johannes Maria De Laat
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHIC APPARATUS, PROGRAMMABLE PATTERNING DEVICE AND LITHOGRA...
- Publication number 20110188016
- Publication date Aug 4, 2011
- ASML NETHERLANDS B.V.
- Pieter Willem Herman De Jager
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20100081072
- Publication date Apr 1, 2010
- ASML NETHERLANDS B.V.
- Nikolay Nikolaevich IOSAD
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20100068416
- Publication date Mar 18, 2010
- ASML NETHERLANDS B.V.
- Nikolay Nikolaevich Iosad
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus and Device Manufacturing Method
- Publication number 20100014059
- Publication date Jan 21, 2010
- ASML NETHERLANDS B.V.
- Gustaaf Willem Van Der Feltz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus and Device Manufacturing Method
- Publication number 20090284720
- Publication date Nov 19, 2009
- ASML NETHERLANDS B.V.
- Richard Alexander George
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20090237635
- Publication date Sep 24, 2009
- ASML NETHERLANDS B.V.
- Keith Frank Best
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus and Device Manufacturing Method
- Publication number 20090213353
- Publication date Aug 27, 2009
- ASML NETHERLANDS B.V.
- Cheng-Qun Gui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC METHOD AND CARRIER SUBSTRATE
- Publication number 20090170025
- Publication date Jul 2, 2009
- ASML NETHERLANDS B.V.
- Wilhelmus Johannes Maria DE LAAT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20080218718
- Publication date Sep 11, 2008
- ASML NETHERLANDS B.V.
- Richard Alexander George
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and method
- Publication number 20080118876
- Publication date May 22, 2008
- ASML NETHERLANDS B.V.
- Cheng-Qun Gui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and method
- Publication number 20080117402
- Publication date May 22, 2008
- ASML NETHERLANDS B.V.
- Keith Frank Best
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20080085462
- Publication date Apr 10, 2008
- ASML NETHERLANDS B.V.
- Keith Frank Best
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Measuring the bonding of bonded substrates
- Publication number 20080083818
- Publication date Apr 10, 2008
- ASML NETHERLANDS B.V.
- Keith Frank Best
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Lithographic method and patterning device
- Publication number 20080032203
- Publication date Feb 7, 2008
- ASML NETHERLANDS B.V.
- Geoffrey Norman Phillipps
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for locating and/or forming bumps
- Publication number 20070265792
- Publication date Nov 15, 2007
- ASML NETHERLANDS B.V.
- Cheng-Qun Gui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Lithographic Apparatus and Device Manufacturing Method
- Publication number 20070242246
- Publication date Oct 18, 2007
- ASML NETHERLANDS B.V.
- Cheng-Qun Gui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20070206172
- Publication date Sep 6, 2007
- ASML NETHERLANDS B.V.
- Cheng-Qun Gui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Large field of view projection optical system with aberration corre...
- Publication number 20070195304
- Publication date Aug 23, 2007
- ASML Holding N.V.
- Robert D. Harned
- G02 - OPTICS
Information Patent Application
Methods and apparatuses for applying wafer-alignment marks
- Publication number 20070196746
- Publication date Aug 23, 2007
- Joseph Consolini
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20070109510
- Publication date May 17, 2007
- ASML NETHERLANDS B.V.
- Pieter Willem Herman De Jager
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20070046919
- Publication date Mar 1, 2007
- ASML NETHERLANDS B.V.
- Cheng-Qun Gui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20060256309
- Publication date Nov 16, 2006
- ASML Netherland B.V.
- Cheng-Qun Gui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection system for a lithograhic apparatus
- Publication number 20060139745
- Publication date Jun 29, 2006
- ASML Holding N.V.
- Cheng-Qun Gui
- G02 - OPTICS
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20060132750
- Publication date Jun 22, 2006
- ASML NETHERLANDS B.V.
- Cheng-Qun Gui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20060114446
- Publication date Jun 1, 2006
- ASML Netherlands B.V.
- Cheng-Qun Gui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20060098175
- Publication date May 11, 2006
- ASML Netherlands B.V.
- Pieter Willem Herman De Jager
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, device manufacturing method, and substrate...
- Publication number 20060098176
- Publication date May 11, 2006
- ASML NETHERLANDS B.V.
- Cheng-Qun Gui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Cheng-Qun Gui

Person

Patents Grantslast 30 patents

Lithographic apparatus and method

Lithographic apparatus, programmable patterning device and lithogra...

Lithographic apparatus and method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and method

Lithographic apparatus, programmable patterning device and lithogra...

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and method

Lithographic apparatus and device manufacturing method

Lithographic method and carrier substrate

Lithographic apparatus and device manufacturing method

Lithographic method and patterning device

Lithographic apparatus and device manufacturing method

Large field of view projection optical system with aberration corre...

Scanning lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Resist recovery method

Lithographic apparatus and device manufacturing method

Optical position assessment apparatus and method

Method and apparatus for locating and/or forming bumps

Lithographic apparatus, device manufacturing method, and substrate...

Lithographic apparatus and device manufacturing method

Projection system for a lithographic apparatus

Large field of view 2X magnification projection optical system for...

Optical position assessment apparatus and method

Patents Applicationslast 30 patents

LITHOGRAPHIC APPARATUS, PROGRAMMABLE PATTERNING DEVICE AND LITHOGRA...

Lithographic Apparatus and Device Manufacturing Method

LITHOGRAPHIC APPARATUS AND METHOD

LITHOGRAPHIC APPARATUS, PROGRAMMABLE PATTERNING DEVICE AND LITHOGRA...

LITHOGRAPHIC APPARATUS AND METHOD

LITHOGRAPHIC APPARATUS AND METHOD

Lithographic Apparatus and Device Manufacturing Method

Lithographic Apparatus and Device Manufacturing Method

LITHOGRAPHIC APPARATUS AND METHOD

Lithographic Apparatus and Device Manufacturing Method

LITHOGRAPHIC METHOD AND CARRIER SUBSTRATE

Lithographic apparatus and device manufacturing method

Lithographic apparatus and method

Lithographic apparatus and method

Lithographic apparatus and device manufacturing method

Measuring the bonding of bonded substrates

Lithographic method and patterning device

Method and apparatus for locating and/or forming bumps

Lithographic Apparatus and Device Manufacturing Method

Lithographic apparatus and device manufacturing method

Large field of view projection optical system with aberration corre...

Methods and apparatuses for applying wafer-alignment marks

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Projection system for a lithograhic apparatus

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus, device manufacturing method, and substrate...