Cheng-Yuan Yao

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Ping-Tung Hsien, TW

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Patents Grantslast 30 patents

Information Patent Grant
Method of cleaning a chamber of a CVD machine and elements within
- Patent number 6,569,253
- Issue date May 27, 2003
- United Microelectronics Corp.
- Wei-Hsu Wang
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...

Patents Applicationslast 30 patents

Information Patent Application
Method of cleaning a chamber of a CVD machine and elements within
- Publication number 20020157687
- Publication date Oct 31, 2002
- Wei-Hsu Wang
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...