Chengfu LIN

Follow

Person

Chiba, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Target device, sputtering apparatus and method for manufacturing a...
- Patent number 9,139,899
- Issue date Sep 22, 2015
- Ulvac, Inc.
- Yutaka Kadowaki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
TARGET DEVICE, SPUTTERING APPARATUS AND METHOD FOR MANUFACTURING A...
- Publication number 20130186752
- Publication date Jul 25, 2013
- ULVAC, Inc.
- Yutaka KADOWAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...