Chengjian Fan

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Jiangsu, CN

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Patents Grantslast 30 patents

Information Patent Grant
Monitoring structure and monitoring method for silicon wet etching...
- Patent number 9,006,867
- Issue date Apr 14, 2015
- CSMC Technologies Fabi Co., Ltd.
- Xinwei Zhang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MONITORING STRUCTURE AND MONITORING METHOD FOR SILICON WET ETCHING...
- Publication number 20140346647
- Publication date Nov 27, 2014
- Xinwei Zhang
- H01 - BASIC ELECTRIC ELEMENTS