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Chenglong Yang
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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Monitoring radical particle concentration using mass spectrometry
Patent number
11,971,386
Issue date
Apr 30, 2024
MKS Instruments, Inc.
Chenglong Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Creating a mini environment for gas analysis
Patent number
10,502,651
Issue date
Dec 10, 2019
Inficon, Inc.
Chenglong Yang
G01 - MEASURING TESTING
Information
Patent Grant
Vacuum chamber measurement using residual gas analyzer
Patent number
9,645,125
Issue date
May 9, 2017
Inficon, Inc.
Chenglong Yang
G01 - MEASURING TESTING
Information
Patent Grant
Inter-process sensing of wafer outcome
Patent number
7,257,494
Issue date
Aug 14, 2007
Inficon, Inc.
William T. Conner
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Monitoring Radical Particle Concentration Using Mass Spectrometry
Publication number
20240264116
Publication date
Aug 8, 2024
MKS Instruments, Inc.
Chenglong Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods and Systems for Feedback Control in Plasma Processing Using...
Publication number
20230369033
Publication date
Nov 16, 2023
MKS Instruments, Inc.
Keith K. Koai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Monitoring Radical Particle Concentration Using Mass Spectrometry
Publication number
20220196597
Publication date
Jun 23, 2022
MKS Instruments, Inc.
Chenglong Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CREATING A MINI ENVIRONMENT FOR GAS ANALYSIS
Publication number
20170097273
Publication date
Apr 6, 2017
Inficon, Inc.
Chenglong Yang
G01 - MEASURING TESTING
Information
Patent Application
VACUUM CHAMBER MEASUREMENT USING RESIDUAL GAS ANALYZER
Publication number
20140157863
Publication date
Jun 12, 2014
Inficon, Inc.
Chenglong Yang
G01 - MEASURING TESTING
Information
Patent Application
IN-SITU ION SOURCE CLEANING FOR PARTIAL PRESSURE ANALYZERS USED IN...
Publication number
20090014644
Publication date
Jan 15, 2009
Inficon, Inc.
Chenglong Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Inter-process sensing of wafer outcome
Publication number
20050256653
Publication date
Nov 17, 2005
Inficon, Inc.
William T. Conner
H01 - BASIC ELECTRIC ELEMENTS