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Patents Grants
last 30 patents
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Patent Grant
Near-field lithography immersion system, immersion unit and interfa...
Patent number
12,078,937
Issue date
Sep 3, 2024
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang Luo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Super-resolution imaging photolithography
Patent number
9,958,784
Issue date
May 1, 2018
THE INSTITUTE OF OPTICS AND ELECTRONICS, CHINESE ACADEMY OF SCIENCES
Xiangang Luo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
NEAR-FIELD LITHOGRAPHY IMMERSION SYSTEM, IMMERSION UNIT AND INTERFA...
Publication number
20240272558
Publication date
Aug 15, 2024
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang LUO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
F-P SENSOR PROBE, ABSOLUTE DISTANCE MEASUREMENT DEVICE, AND ABSOLUT...
Publication number
20240264285
Publication date
Aug 8, 2024
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang LUO
G01 - MEASURING TESTING
Information
Patent Application
SUPER-RESOLUTION IMAGING PHOTOLITHOGRAPHY
Publication number
20160259253
Publication date
Sep 8, 2016
Institute of Optics and Electronics, Chinese Academy of Sciences
Xiangang LUO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY