Chengxiang Ji

Follow

Person

Waltham, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Microwave plasma applicator with improved power uniformity
- Patent number 9,653,266
- Issue date May 16, 2017
- MKS Instruments, Inc.
- Xing Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reduction of copper or trace metal contaminants in plasma electroly...
- Patent number 8,888,982
- Issue date Nov 18, 2014
- MKS Instruments Inc.
- Xing Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
MICROWAVE PLASMA APPLICATOR WITH IMPROVED POWER UNIFORMITY
- Publication number 20150318148
- Publication date Nov 5, 2015
- MKS Instruments, Inc.
- Xing Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE PLASMA APPLICATOR WITH IMPROVED POWER UNIFORMITY
- Publication number 20150279626
- Publication date Oct 1, 2015
- MKS Instruments, Inc.
- Xing Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS INJECTOR APPARATUS FOR PLASMA APPLICATOR
- Publication number 20130146225
- Publication date Jun 13, 2013
- MKS Instruments, Inc.
- Xing Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Reduction of Copper or Trace Metal Contaminants in Plasma Electroly...
- Publication number 20110297319
- Publication date Dec 8, 2011
- MKS Instruments, Inc.
- Xing Chen
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR