Chengzhu Qi

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Tualatin, OR, US

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Patents Grantslast 30 patents

Information Patent Grant
Carrier ring wall for reduction of back-diffusion of reactive speci...
- Patent number 10,475,627
- Issue date Nov 12, 2019
- Lam Research Corporation
- Chengzhu Qi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
LOW TEMPERATURE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION PROCESS I...
- Publication number 20220336191
- Publication date Oct 20, 2022
- LAM RESEARCH CORPORATION
- Boyi HAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CARRIER RING WALL FOR REDUCTION OF BACK-DIFFUSION OF REACTIVE SPECI...
- Publication number 20170278681
- Publication date Sep 28, 2017
- LAM RESEARCH CORPORATION
- Chengzhu Qi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...