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Chenxi LIN
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Newark, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method to predict yield of a device manufacturing process
Patent number
12,055,904
Issue date
Aug 6, 2024
ASML Netherlands B.V.
Youping Zhang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method to label substrates based on process parameters
Patent number
12,045,555
Issue date
Jul 23, 2024
ASML Netherlands B.V.
Vahid Bastani
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method of manufacturing devices
Patent number
12,044,980
Issue date
Jul 23, 2024
ASML Netherlands B.V.
Abraham Slachter
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method for controlling a manufacturing process and associated appar...
Patent number
11,947,266
Issue date
Apr 2, 2024
ASML Netherlands B.V.
Nicolaas Petrus Marcus Brantjes
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for determining root cause affecting yield in a semiconducto...
Patent number
11,803,127
Issue date
Oct 31, 2023
ASML Netherlands B.V.
Chenxi Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for determining corrections for lithographic apparatus
Patent number
11,754,931
Issue date
Sep 12, 2023
ASML Netherlands B.V.
Roy Werkman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method to predict yield of a device manufacturing process
Patent number
11,714,357
Issue date
Aug 1, 2023
ASML Netherlands B.V.
Alexander Ypma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Identification of hot spots or defects by machine learning
Patent number
11,443,083
Issue date
Sep 13, 2022
ASML Netherlands B.V.
Jing Su
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Methods of guiding process models and inspection in a manufacturing...
Patent number
11,183,434
Issue date
Nov 23, 2021
ASML Netherlands B.V.
Yu Cao
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method for determining a control parameter for an apparatus utilize...
Patent number
11,181,829
Issue date
Nov 23, 2021
ASML Netherlands B.V.
Cyrus Emil Tabery
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method to predict yield of a device manufacturing process
Patent number
11,086,229
Issue date
Aug 10, 2021
ASML Netherlands B.V.
Alexander Ypma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
TRAINING MACHINE LEARNING MODELS BASED ON PARTIAL DATASETS FOR DEFE...
Publication number
20240069450
Publication date
Feb 29, 2024
ASML NETHERLANDS B.V.
Nabeel Noor MOIN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
ACTIVE LEARNING-BASED DEFECT LOCATION IDENTIFICATION
Publication number
20230401694
Publication date
Dec 14, 2023
ASML NETHERLANDS B.V.
Chenxi LIN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR ADJUSTING A PATTERNING PROCESS
Publication number
20230273529
Publication date
Aug 31, 2023
ASML NETHERLANDS B.V.
Satej Subhash KHEDEKAR
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IDENTIFICATION OF HOT SPOTS OR DEFECTS BY MACHINE LEARNING
Publication number
20220277116
Publication date
Sep 1, 2022
ASML NETHERLANDS B.V.
Jing SU
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR DETERMINING CORRECTIONS FOR LITHOGRAPHIC APPARATUS
Publication number
20220252988
Publication date
Aug 11, 2022
ASML NETHERLANDS B.V.
Roy WERKMAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR CONTROLLING A MANUFACTURING PROCESS AND ASSOCIATED APPAR...
Publication number
20220026810
Publication date
Jan 27, 2022
ASML NETHERLANDS B.V.
Nicolaas Petrus Marcus BRANTJES
G05 - CONTROLLING REGULATING
Information
Patent Application
METHOD TO PREDICT YIELD OF A DEVICE MANUFACTURING PROCESS
Publication number
20220011728
Publication date
Jan 13, 2022
ASML NETHERLANDS B.V.
Youping ZHANG
G05 - CONTROLLING REGULATING
Information
Patent Application
METHOD OF MANUFACTURING DEVICES
Publication number
20210397172
Publication date
Dec 23, 2021
ASML NETHERLANDS B.V.
Abraham SLACHTER
G05 - CONTROLLING REGULATING
Information
Patent Application
METHOD FOR DETERMINING ROOT CAUSE AFFECTING YIELD IN A SEMICONDUCTO...
Publication number
20210389677
Publication date
Dec 16, 2021
ASML NETHERLANDS B.V.
Chenxi LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR GENERATING CHARACTERISTIC PATTERN AND TRAINING MACHINE...
Publication number
20210357566
Publication date
Nov 18, 2021
ASML Netherland B.V.
Mark Christopher SIMMONS
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD TO PREDICT YIELD OF A DEVICE MANUFACTURING PROCESS
Publication number
20210325788
Publication date
Oct 21, 2021
ASML NETHERLANDS B.V.
Alexander YPMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR DETERMINING A CONTROL PARAMETER FOR AN APPARATUS UTILIZE...
Publication number
20210132508
Publication date
May 6, 2021
ASML NETHERLANDS B.V.
Cyrus Emil TABERY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD TO LABEL SUBSTRATES BASED ON PROCESS PARAMETERS
Publication number
20200356881
Publication date
Nov 12, 2020
ASML NETHERLANDS B.V.
Vahid BASTANI
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD TO PREDICT YIELD OF A DEVICE MANUFACTURING PROCESS
Publication number
20200103761
Publication date
Apr 2, 2020
ASML NETHERLANDS B.V.
Alexander YPMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ASSIST FEATURE PLACEMENT BASED ON MACHINE LEARNING
Publication number
20200050099
Publication date
Feb 13, 2020
ASML NETHERLANDS B.V.
Jing SU
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHODS OF GUIDING PROCESS MODELS AND INSPECTION IN A MANUFACTURING...
Publication number
20190348331
Publication date
Nov 14, 2019
ASML NETHERLANDS B.V.
Yu CAO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
IDENTIFICATION OF HOT SPOTS OR DEFECTS BY MACHINE LEARNING
Publication number
20190147127
Publication date
May 16, 2019
ASML NETHERLANDS B.V.
Jing SU
G06 - COMPUTING CALCULATING COUNTING