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CHEOL-YONG SHIN
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Seoul, KR
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Patents Grants
last 30 patents
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Patent Grant
Standby port and substrate processing apparatus having the same
Patent number
10,825,699
Issue date
Nov 3, 2020
Semes Co., Ltd.
Buyoung Jung
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SUPPORT UNIT AND APPARATUS FOR TREATING SUBSTRATE
Publication number
20220157645
Publication date
May 19, 2022
SEMES CO., LTD.
SOO HAN SONG
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
STANDBY PORT AND SUBSTRATE PROCESSING APPARATUS HAVING THE SAME
Publication number
20190189471
Publication date
Jun 20, 2019
SEMES CO., LTD.
BUYOUNG JUNG
H01 - BASIC ELECTRIC ELEMENTS