Cheoljung KIM

Follow

Person

Nirasaki City, JP

People

Patents Applicationslast 30 patents

Information Patent Application
CLEANING METHOD OF SILICON OXIDE FILM FORMING APPARATUS, SILICON OX...
- Publication number 20150267292
- Publication date Sep 24, 2015
- TOKYO ELECTRON LIMITED
- Cheoljung KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD
- Publication number 20150093518
- Publication date Apr 2, 2015
- TOKYO ELECTRON LIMITED
- Tomihiro YONENAGA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...