CHEONKYU LEE

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Hwaseong-si, KR

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and method of manufacturing semiconduct...
- Patent number 12,106,945
- Issue date Oct 1, 2024
- Samsung Electronics Co., Ltd.
- Siqing Lu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 11,244,839
- Issue date Feb 8, 2022
- Samsung Electronics Co., Ltd.
- Cheonkyu Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of etching at low temperature and plasma etching apparatus
- Patent number 10,818,503
- Issue date Oct 27, 2020
- Samsung Electronics Co., Ltd.
- Cheonkyu Lee
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20220076931
- Publication date Mar 10, 2022
- Samsung Electronics Co., Ltd.
- Siqing Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20200176230
- Publication date Jun 4, 2020
- Samsung Electronics Co., Ltd.
- Siqing LU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20200066557
- Publication date Feb 27, 2020
- Samsung Electronics Co., Ltd.
- Cheonkyu LEE
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD OF ETCHING AT LOW TEMPERATURE AND PLASMA ETCHING APPARATUS
- Publication number 20190385860
- Publication date Dec 19, 2019
- Samsung Electronics Co., Ltd.
- CHEONKYU LEE
- H01 - BASIC ELECTRIC ELEMENTS