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CHETHAN MANGALORE
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Bangalore, IN
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Patents Grants
last 30 patents
Information
Patent Grant
Electrostatic chuck with embossed top plate and cooling channels
Patent number
10,832,931
Issue date
Nov 10, 2020
Applied Materials, Inc.
Chethan Mangalore
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Source RF power split inner coil to improve BCD and etch depth perf...
Patent number
10,211,030
Issue date
Feb 19, 2019
Applied Materials, Inc.
Rongping Wang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SOURCE RF POWER SPLIT INNER COIL TO IMPROVE BCD AND ETCH DEPTH PERF...
Publication number
20170200585
Publication date
Jul 13, 2017
Applied Materials, Inc.
Rongping WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK WITH EMBOSSED TOP PLATE AND COOLING CHANNELS
Publication number
20150348813
Publication date
Dec 3, 2015
Applied Materials, Inc.
CHETHAN MANGALORE
H01 - BASIC ELECTRIC ELEMENTS