Chi-I Lang

Person

Cupertino, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Two-dimension self-aligned scheme with subtractive metal etch
- Patent number 12,327,764
- Issue date Jun 10, 2025
- Applied Materials, Inc.
- Yung-chen Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tin oxide and tin carbide materials for semiconductor patterning ap...
- Patent number 12,272,564
- Issue date Apr 8, 2025
- Applied Materials, Inc.
- Yung-chen Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atomic layer etching of Ru metal
- Patent number 12,020,908
- Issue date Jun 25, 2024
- Applied Materials, Inc.
- Yung-chen Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming interconnect for semiconductor device
- Patent number 11,508,617
- Issue date Nov 22, 2022
- Applied Materials, Inc.
- Hao Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film stack for lithography applications
- Patent number 11,495,461
- Issue date Nov 8, 2022
- Applied Materials, Inc.
- Tejinder Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Patterning scheme to improve EUV resist and hard mask selectivity
- Patent number 11,437,238
- Issue date Sep 6, 2022
- Applied Materials, Inc.
- Nancy Fung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Diamond-like carbon as mandrel
- Patent number 10,954,129
- Issue date Mar 23, 2021
- Applied Materials, Inc.
- Takehito Koshizawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of etching hardmasks containing high hardness materials
- Patent number 10,867,795
- Issue date Dec 15, 2020
- Applied Materials, Inc.
- Nancy Fung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for coating a substrate with an amphiphilic compound
- Patent number 9,245,848
- Issue date Jan 26, 2016
- Intermolecular, Inc.
- Anh Duong
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Combinatorial plasma enhanced deposition and etch techniques
- Patent number 9,245,744
- Issue date Jan 26, 2016
- Intermolecular, Inc.
- Sunil Shanker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma treatment of low-K surface to improve barrier deposition
- Patent number 9,245,793
- Issue date Jan 26, 2016
- Intermolecular, Inc.
- Ratsamee Limdulpaiboon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to control depth profiles of dopants using a remote plasma s...
- Patent number 9,224,644
- Issue date Dec 29, 2015
- Intermolecular, Inc.
- Sandip Niyogi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High metal ionization sputter gun
- Patent number 9,175,382
- Issue date Nov 3, 2015
- Intermolecular, Inc.
- Hong Sheng Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming resistive switching memory elements
- Patent number 9,178,145
- Issue date Nov 3, 2015
- Intermolecular, Inc.
- Nitin Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High throughput current-voltage combinatorial characterization tool...
- Patent number 9,176,181
- Issue date Nov 3, 2015
- Intermolecular, Inc.
- Yun Wang
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Resistive-switching memory element
- Patent number 9,147,841
- Issue date Sep 29, 2015
- Intermolecular, Inc.
- Tony P. Chiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High throughput quantum efficiency combinatorial characterization t...
- Patent number 9,103,871
- Issue date Aug 11, 2015
- Intermolecular, Inc.
- Yun Wang
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Method and system of improved uniformity testing
- Patent number 9,105,563
- Issue date Aug 11, 2015
- Intermolecular, Inc.
- Charlene Chen
- G01 - MEASURING TESTING
Information Patent Grant
Methods and apparatus for combinatorial PECVD or PEALD
- Patent number 9,023,438
- Issue date May 5, 2015
- Intermolecular, Inc.
- ShouQian Shao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hydrogen plasma cleaning of germanium oxide surfaces
- Patent number 8,987,143
- Issue date Mar 24, 2015
- Intermolecular, Inc.
- Ratsamee Limdulpaiboon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resistive-switching memory element
- Patent number 8,980,709
- Issue date Mar 17, 2015
- Intermolecular, Inc.
- Tony P. Chiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Graphene barrier layers for interconnects and methods for forming t...
- Patent number 8,927,415
- Issue date Jan 6, 2015
- Intermolecular, Inc.
- Sandip Niyogi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Combinatorial processing using high deposition rate sputtering
- Patent number 8,920,618
- Issue date Dec 30, 2014
- Intermolecular, Inc.
- Hong Sheng Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Control of film composition in co-sputter deposition by using colli...
- Patent number 8,906,207
- Issue date Dec 9, 2014
- Intermolecular, Inc.
- Hong Sheng Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nucleation interface for high-k layer on germanium
- Patent number 8,901,677
- Issue date Dec 2, 2014
- Intermolecular, Inc.
- Frank Greer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and systems for dispensing different liquids for high produ...
- Patent number 8,893,923
- Issue date Nov 25, 2014
- Intermolecular, Inc.
- Satbir Kahlon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nonvolatile memory elements with metal-deficient resistive-switchin...
- Patent number 8,889,479
- Issue date Nov 18, 2014
- Intermolecular, Inc.
- Nitin Kumar
- G11 - INFORMATION STORAGE
Information Patent Grant
Methods for coating a substrate with an amphiphilic compound
- Patent number 8,871,860
- Issue date Oct 28, 2014
- Intermolecular, Inc.
- Anh Duong
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Methods for forming resistive switching memory elements
- Patent number 8,865,518
- Issue date Oct 21, 2014
- Intermolecular, Inc.
- Nitin Kumar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Formation of a zinc passivation layer on titanium or titanium alloy...
- Patent number 8,859,427
- Issue date Oct 14, 2014
- Intermolecular, Inc.
- Bob Kong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
TIN OXIDE AND TIN CARBIDE MATERIALS FOR SEMICONDUCTOR PATTERNING AP...
- Publication number 20250226235
- Publication date Jul 10, 2025
- Applied Materials, Inc.
- Yung-chen LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR FORMING LOW-K DIELECTRIC MATERIALS WITH REDUCED DIELECT...
- Publication number 20250069884
- Publication date Feb 27, 2025
- Applied Materials, Inc.
- Rui Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR FORMING LOW-K DIELECTRIC MATERIALS WITH REDUCED DIELECT...
- Publication number 20250062117
- Publication date Feb 20, 2025
- Applied Materials, Inc.
- Shanshan Yao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF PULSING ASSISTED LOW-K FILM DEPOSITION WITH HIGH MECHANICAL STRE...
- Publication number 20250054749
- Publication date Feb 13, 2025
- Applied Materials, Inc.
- Kent Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD TO REDUCE DEFECTS POST-SEQUENTIAL INFILTRATION SYNTHESIS
- Publication number 20240419081
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Lin ZHOU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEMS AND METHODS FOR IMPROVING MECHANICAL STRENGTH OF LOW DIELEC...
- Publication number 20240420953
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Rui Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR FORMING LOW-K DIELECTRIC MATERIALS WITH INCREASED ETCH...
- Publication number 20240387167
- Publication date Nov 21, 2024
- Applied Materials, Inc.
- Shanshan Yao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPLANT INTO EUV METAL OXIDE PHOTORESIST MODULE TO REDUCE EUV DOSE
- Publication number 20240379376
- Publication date Nov 14, 2024
- Applied Materials, Inc.
- Rajesh Prasad
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR FORMING LOW-K DIELECTRIC MATERIALS
- Publication number 20240363337
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Muthukumar Kaliappan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PREFERENTIAL INFILTRATION IN LITHOGRAPHIC PROCESS FLOW FOR EUV CAR...
- Publication number 20240272552
- Publication date Aug 15, 2024
- Applied Materials, Inc.
- GABRIELA ALVA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV PHOTORESIST AND UNDERLAYER ADHESION MODULATION
- Publication number 20240184207
- Publication date Jun 6, 2024
- Applied Materials, Inc.
- Zhiyu Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ALUMINUM OXIDE CARBON HYBRID HARDMASKS AND METHODS FOR MAKING THE SAME
- Publication number 20240142869
- Publication date May 2, 2024
- Applied Materials, Inc.
- Yung-chen LIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ALUMINUM OXIDE CARBON HYBRID HARDMASKS AND METHODS FOR MAKING THE SAME
- Publication number 20240145245
- Publication date May 2, 2024
- Applied Materials, Inc.
- Yung-chen LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALUMINUM OXIDE CARBON HYBRID HARDMASKS AND METHODS FOR MAKING THE SAME
- Publication number 20240142870
- Publication date May 2, 2024
- Applied Materials, Inc.
- Yung-chen LIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ION IMPLANTATION FOR INCREASED ADHESION WITH RESIST MATERIAL
- Publication number 20240071773
- Publication date Feb 29, 2024
- Applied Materials, Inc.
- Lei Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRODE TUNING, DEPOSITING, AND ETCHING METHODS
- Publication number 20230215735
- Publication date Jul 6, 2023
- Applied Materials, Inc.
- Lei LIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR TREATING PHOTORESISTS WITH NON-METAL COMPOUNDS
- Publication number 20230095970
- Publication date Mar 30, 2023
- Applied Materials, Inc.
- Zhiyu HUANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING INTERCONNECT FOR SEMICONDUCTOR DEVICE
- Publication number 20230045689
- Publication date Feb 9, 2023
- Applied Materials, Inc.
- Hao Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TWO-DIMENSION SELF-ALIGNED SCHEME WITH SUBTRACTIVE METAL ETCH
- Publication number 20230033038
- Publication date Feb 2, 2023
- Applied Materials, Inc.
- Yung-chen LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER ETCHING OF RU METAL
- Publication number 20220392752
- Publication date Dec 8, 2022
- Applied Materials, Inc.
- Yung-chen LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERNING SCHEME TO IMPROVE EUV RESIST AND HARD MASK SELECTIVITY
- Publication number 20220367186
- Publication date Nov 17, 2022
- Applied Materials, Inc.
- Nancy Fung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION OF BORON FILMS
- Publication number 20220199401
- Publication date Jun 23, 2022
- Applied Materials, Inc.
- Yung-Chen Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TIN OXIDE AND TIN CARBIDE MATERIALS FOR SEMICONDUCTOR PATTERNING AP...
- Publication number 20220189786
- Publication date Jun 16, 2022
- Applied Materials, Inc.
- Yung-chen LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING INTERCONNECT FOR SEMICONDUCTOR DEVICE
- Publication number 20210125864
- Publication date Apr 29, 2021
- Applied Materials, Inc.
- Hao Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM STACK FOR LITHOGRAPHY APPLICATIONS
- Publication number 20200273705
- Publication date Aug 27, 2020
- Applied Materials, Inc.
- Tejinder SINGH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Patterning Scheme To Improve EUV Resist And Hard Mask Selectivity
- Publication number 20200013620
- Publication date Jan 9, 2020
- Applied Materials, Inc.
- Nancy Fung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Diamond-Like Carbon As Mandrel
- Publication number 20180358229
- Publication date Dec 13, 2018
- Applied Materials, Inc.
- Takehito Koshizawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF ETCHING HARDMASKS CONTAINING HIGH HARDNESS MATERIALS
- Publication number 20180337047
- Publication date Nov 22, 2018
- Applied Materials, Inc.
- Nancy FUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and Apparatus for Combinatorial PECVD or PEALD
- Publication number 20150184298
- Publication date Jul 2, 2015
- Intermolecular, Inc.
- ShouQian Shao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma Treatment of Low-K Surface to Improve Barrier Deposition
- Publication number 20150179509
- Publication date Jun 25, 2015
- Intermolecular, Inc.
- Ratsamee Limdulpaiboon
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Two-dimension self-aligned scheme with subtractive metal etch

Tin oxide and tin carbide materials for semiconductor patterning ap...

Atomic layer etching of Ru metal

Method of forming interconnect for semiconductor device

Film stack for lithography applications

Patterning scheme to improve EUV resist and hard mask selectivity

Diamond-like carbon as mandrel

Method of etching hardmasks containing high hardness materials

Methods for coating a substrate with an amphiphilic compound

Combinatorial plasma enhanced deposition and etch techniques

Plasma treatment of low-K surface to improve barrier deposition

Method to control depth profiles of dopants using a remote plasma s...

High metal ionization sputter gun

Methods for forming resistive switching memory elements

High throughput current-voltage combinatorial characterization tool...

Resistive-switching memory element

High throughput quantum efficiency combinatorial characterization t...

Method and system of improved uniformity testing

Methods and apparatus for combinatorial PECVD or PEALD

Hydrogen plasma cleaning of germanium oxide surfaces

Resistive-switching memory element

Graphene barrier layers for interconnects and methods for forming t...

Combinatorial processing using high deposition rate sputtering

Control of film composition in co-sputter deposition by using colli...

Nucleation interface for high-k layer on germanium

Methods and systems for dispensing different liquids for high produ...

Nonvolatile memory elements with metal-deficient resistive-switchin...

Methods for coating a substrate with an amphiphilic compound

Methods for forming resistive switching memory elements

Formation of a zinc passivation layer on titanium or titanium alloy...

Patents Applicationslast 30 patents

TIN OXIDE AND TIN CARBIDE MATERIALS FOR SEMICONDUCTOR PATTERNING AP...

METHODS FOR FORMING LOW-K DIELECTRIC MATERIALS WITH REDUCED DIELECT...

METHODS FOR FORMING LOW-K DIELECTRIC MATERIALS WITH REDUCED DIELECT...

RF PULSING ASSISTED LOW-K FILM DEPOSITION WITH HIGH MECHANICAL STRE...

METHOD TO REDUCE DEFECTS POST-SEQUENTIAL INFILTRATION SYNTHESIS

SYSTEMS AND METHODS FOR IMPROVING MECHANICAL STRENGTH OF LOW DIELEC...

METHODS FOR FORMING LOW-K DIELECTRIC MATERIALS WITH INCREASED ETCH...

IMPLANT INTO EUV METAL OXIDE PHOTORESIST MODULE TO REDUCE EUV DOSE

METHODS FOR FORMING LOW-K DIELECTRIC MATERIALS

PREFERENTIAL INFILTRATION IN LITHOGRAPHIC PROCESS FLOW FOR EUV CAR...

EUV PHOTORESIST AND UNDERLAYER ADHESION MODULATION

ALUMINUM OXIDE CARBON HYBRID HARDMASKS AND METHODS FOR MAKING THE SAME

ALUMINUM OXIDE CARBON HYBRID HARDMASKS AND METHODS FOR MAKING THE SAME

ALUMINUM OXIDE CARBON HYBRID HARDMASKS AND METHODS FOR MAKING THE SAME

ION IMPLANTATION FOR INCREASED ADHESION WITH RESIST MATERIAL

ELECTRODE TUNING, DEPOSITING, AND ETCHING METHODS

METHODS FOR TREATING PHOTORESISTS WITH NON-METAL COMPOUNDS

METHOD OF FORMING INTERCONNECT FOR SEMICONDUCTOR DEVICE

TWO-DIMENSION SELF-ALIGNED SCHEME WITH SUBTRACTIVE METAL ETCH

ATOMIC LAYER ETCHING OF RU METAL

PATTERNING SCHEME TO IMPROVE EUV RESIST AND HARD MASK SELECTIVITY

DEPOSITION OF BORON FILMS

TIN OXIDE AND TIN CARBIDE MATERIALS FOR SEMICONDUCTOR PATTERNING AP...

METHOD OF FORMING INTERCONNECT FOR SEMICONDUCTOR DEVICE

FILM STACK FOR LITHOGRAPHY APPLICATIONS

Patterning Scheme To Improve EUV Resist And Hard Mask Selectivity

Diamond-Like Carbon As Mandrel

METHODS OF ETCHING HARDMASKS CONTAINING HIGH HARDNESS MATERIALS

Methods and Apparatus for Combinatorial PECVD or PEALD

Plasma Treatment of Low-K Surface to Improve Barrier Deposition