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Chi-Liang Cheng
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Bade City, TW
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Patent Application
Method for preparing copper interconnectors of an ULSI
Publication number
20060228488
Publication date
Oct 12, 2006
Chung Cheng Institute of Technology, National Defense University
Yuh Sung
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...