Chi-Lu YANG

Person

Tainan, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing a semiconductor device and pattern formatio...
- Patent number 12,222,643
- Issue date Feb 11, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Cheng Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for generating extreme ultraviolet radiation
- Patent number 12,193,136
- Issue date Jan 7, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wei-Chih Lai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor device including capacitor and resistor
- Patent number 12,183,670
- Issue date Dec 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chi-Han Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Formation and in-situ etching processes for metal layers
- Patent number 12,170,202
- Issue date Dec 17, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Po-Yu Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gate structure and semiconductor device having the same
- Patent number 12,166,126
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Chieh Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a semiconductor device and pattern formatio...
- Patent number 12,159,787
- Issue date Dec 3, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Cheng Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Photoresist for semiconductor fabrication
- Patent number 12,153,346
- Issue date Nov 26, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Cheng Liu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of manufacturing a semiconductor device
- Patent number 12,135,501
- Issue date Nov 5, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ming-Hui Weng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma position control for extreme ultraviolet lithography light s...
- Patent number 12,130,556
- Issue date Oct 29, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ssu-Yu Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
State detection circuit for detecting tri-state and state detection...
- Patent number 12,111,339
- Issue date Oct 8, 2024
- Richtek Technology Corporation
- Chun-Jen Yu
- G01 - MEASURING TESTING
Information Patent Grant
Control of dynamic gas lock flow inlets of an intermediate focus cap
- Patent number 12,085,861
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Kai Chang
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Particle image velocimetry of extreme ultraviolet lithography systems
- Patent number 12,085,585
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- En Hao Lai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Photoresist layer surface treatment, cap layer, and method of formi...
- Patent number 12,057,315
- Issue date Aug 6, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Chen Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extreme ultraviolet lithography system
- Patent number 12,055,865
- Issue date Aug 6, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ssu-Yu Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photoresist for semiconductor fabrication
- Patent number 12,044,966
- Issue date Jul 23, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Cheng Liu
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Lithography apparatus and method
- Patent number 12,007,694
- Issue date Jun 11, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wei-Chun Yen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for polishing semiconductor substrate
- Patent number 11,999,027
- Issue date Jun 4, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- James Jeng-Jyi Hwang
- B24 - GRINDING POLISHING
Information Patent Grant
Resistor within a via
- Patent number 11,935,829
- Issue date Mar 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chi-Han Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor lithography system and/or method
- Patent number 11,921,430
- Issue date Mar 5, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Tsiao-Chen Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for manufacturing semiconductor structure
- Patent number 11,908,700
- Issue date Feb 20, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Nai-Han Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light guide assembly
- Patent number 11,867,941
- Issue date Jan 9, 2024
- Cyntec Co., Ltd.
- Chi-Jui Yang
- G02 - OPTICS
Information Patent Grant
Metal-insulator-metal capacitor within metallization structure
- Patent number 11,855,230
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chi-Han Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a semiconductor device
- Patent number 11,822,237
- Issue date Nov 21, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ming-Hui Weng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Module vessel with scrubber gutters sized to prevent overflow
- Patent number 11,815,821
- Issue date Nov 14, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Kai Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for firmware for adaptable baseboard management c...
- Patent number 11,809,364
- Issue date Nov 7, 2023
- Quanta Computer Inc.
- Chi-Ling Yang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Width adjustment of EUV radiation beam
- Patent number 11,796,917
- Issue date Oct 24, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chi Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for generating extreme ultraviolet radiation
- Patent number 11,792,909
- Issue date Oct 17, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wei-Chih Lai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of manufacturing a semiconductor device
- Patent number 11,784,046
- Issue date Oct 10, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jia-Lin Wei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and methods for chemical mechanical polishing
- Patent number 11,772,227
- Issue date Oct 3, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- James Jeng-Jyi Hwang
- B24 - GRINDING POLISHING
Information Patent Grant
Organometallic cluster photoresists for EUV lithography
- Patent number 11,767,336
- Issue date Sep 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hsu-Kai Chang
- C07 - ORGANIC CHEMISTRY

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF FORMING GATE STRUCTURE
- Publication number 20250063759
- Publication date Feb 20, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Chieh Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE DETECTION SYSTEM
- Publication number 20250044164
- Publication date Feb 6, 2025
- HERMES TESTING SOLUTIONS INC.
- Chi-Ming Yang
- G01 - MEASURING TESTING
Information Patent Application
Metal-Insulator-Metal Capacitor Within Metallization Structure
- Publication number 20250038102
- Publication date Jan 30, 2025
- Taiwan Semiconductor Manufacturing company Ltd.
- Chi-Han Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHYSIOLOGICAL INFORMATION MONITORING SYSTEM
- Publication number 20240420838
- Publication date Dec 19, 2024
- QUANTA COMPUTER INC.
- Yen-Ching YU
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
LITHOGRAPHY SYSTEM AND METHODS
- Publication number 20240419082
- Publication date Dec 19, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ming-Hsin CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CARBON-BASED LINER TO REDUCE CONTACT RESISTANCE
- Publication number 20240395612
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Po-Hsien CHENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING THEREOF
- Publication number 20240395600
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Yao Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND PATTERN FORMATIO...
- Publication number 20240387173
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Cheng LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LITHOGRAPHY SYSTEM AND METHODS
- Publication number 20240385509
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chi YANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CONTROL OF DYNAMIC GAS LOCK FLOW INLETS OF AN INTERMEDIATE FOCUS CAP
- Publication number 20240385527
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Kai CHANG
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20240385514
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ming-Hui WENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTORESIST FOR SEMICONDUCTOR FABRICATION
- Publication number 20240385516
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Cheng Liu
- C07 - ORGANIC CHEMISTRY
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20240385523
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Cheng LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTORESIST FOR SEMICONDUCTOR FABRICATION
- Publication number 20240377732
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Cheng Liu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR FORMING A SEMICONDUCTOR STRUCTURE USING DEHYDRATING CHEM...
- Publication number 20240379447
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- CHUNG-CHIEH LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FORMATION AND IN-SITU ETCHING PROCESSES FOR METAL LAYERS
- Publication number 20240363350
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Po-Yu LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE IMAGE VELOCIMETRY OF EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEMS
- Publication number 20240361350
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- En Hao LAI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PHOTORESIST LAYER SURFACE TREATMENT, CAP LAYER, AND METHOD OF FORMI...
- Publication number 20240355623
- Publication date Oct 24, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Chen KUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEM
- Publication number 20240353766
- Publication date Oct 24, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ssu-Yu Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HIGH EFFICIENCY SWITCHING CONVERTER AND CONVERSION CONTROL CIRCUIT...
- Publication number 20240305186
- Publication date Sep 12, 2024
- RICHTEK TECHNOLOGY CORPORATION
- Chun-Jen Yu
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
Lithography Apparatus and Method
- Publication number 20240295825
- Publication date Sep 5, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wei-Chun Yen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR LITHOGRAPHY SYSTEM AND/OR METHOD
- Publication number 20240248412
- Publication date Jul 25, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Tsiao-Chen Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR PACKAGING DEVICE AND HEAT DISSIPATION COVER THEREOF
- Publication number 20240213112
- Publication date Jun 27, 2024
- Global Unichip Corporation
- Sheng-Fan YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RESISTOR WITHIN A VIA
- Publication number 20240162145
- Publication date May 16, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi-Han YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
In-Situ Deposition and Densification Treatment for Metal-Comprising...
- Publication number 20240019778
- Publication date Jan 18, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Chen Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARBON-BASED LINER TO REDUCE CONTACT RESISTANCE
- Publication number 20230402321
- Publication date Dec 14, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Po-Hsien CHENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULE VESSEL WITH SCRUBBER GUTTERS SIZED TO PREVENT OVERFLOW
- Publication number 20230384697
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Kai CHANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20230375920
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ming-Hui WENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WIDTH ADJUSTMENT OF EUV RADIATION BEAM
- Publication number 20230367221
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20230369048
- Publication date Nov 16, 2023
- Jia-Lin WEI
- H01 - BASIC ELECTRIC ELEMENTS

Chi-Lu YANG

Person

Patents Grantslast 30 patents

Method of manufacturing a semiconductor device and pattern formatio...

Apparatus and method for generating extreme ultraviolet radiation

Semiconductor device including capacitor and resistor

Formation and in-situ etching processes for metal layers

Gate structure and semiconductor device having the same

Method of manufacturing a semiconductor device and pattern formatio...

Photoresist for semiconductor fabrication

Method of manufacturing a semiconductor device

Plasma position control for extreme ultraviolet lithography light s...

State detection circuit for detecting tri-state and state detection...

Control of dynamic gas lock flow inlets of an intermediate focus cap

Particle image velocimetry of extreme ultraviolet lithography systems

Photoresist layer surface treatment, cap layer, and method of formi...

Extreme ultraviolet lithography system

Photoresist for semiconductor fabrication

Lithography apparatus and method

Method for polishing semiconductor substrate

Resistor within a via

Semiconductor lithography system and/or method

Method for manufacturing semiconductor structure

Light guide assembly

Metal-insulator-metal capacitor within metallization structure

Method of manufacturing a semiconductor device

Module vessel with scrubber gutters sized to prevent overflow

Method and system for firmware for adaptable baseboard management c...

Width adjustment of EUV radiation beam

Apparatus and method for generating extreme ultraviolet radiation

Method of manufacturing a semiconductor device

Device and methods for chemical mechanical polishing

Organometallic cluster photoresists for EUV lithography

Patents Applicationslast 30 patents

METHOD OF FORMING GATE STRUCTURE

TEMPERATURE DETECTION SYSTEM

Metal-Insulator-Metal Capacitor Within Metallization Structure

PHYSIOLOGICAL INFORMATION MONITORING SYSTEM

LITHOGRAPHY SYSTEM AND METHODS

CARBON-BASED LINER TO REDUCE CONTACT RESISTANCE

SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING THEREOF

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND PATTERN FORMATIO...

LITHOGRAPHY SYSTEM AND METHODS

CONTROL OF DYNAMIC GAS LOCK FLOW INLETS OF AN INTERMEDIATE FOCUS CAP

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

PHOTORESIST FOR SEMICONDUCTOR FABRICATION

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

PHOTORESIST FOR SEMICONDUCTOR FABRICATION

METHOD FOR FORMING A SEMICONDUCTOR STRUCTURE USING DEHYDRATING CHEM...

FORMATION AND IN-SITU ETCHING PROCESSES FOR METAL LAYERS

PARTICLE IMAGE VELOCIMETRY OF EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEMS

PHOTORESIST LAYER SURFACE TREATMENT, CAP LAYER, AND METHOD OF FORMI...

EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEM

HIGH EFFICIENCY SWITCHING CONVERTER AND CONVERSION CONTROL CIRCUIT...

Lithography Apparatus and Method

SEMICONDUCTOR LITHOGRAPHY SYSTEM AND/OR METHOD

SEMICONDUCTOR PACKAGING DEVICE AND HEAT DISSIPATION COVER THEREOF

RESISTOR WITHIN A VIA

In-Situ Deposition and Densification Treatment for Metal-Comprising...

CARBON-BASED LINER TO REDUCE CONTACT RESISTANCE

MODULE VESSEL WITH SCRUBBER GUTTERS SIZED TO PREVENT OVERFLOW

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

WIDTH ADJUSTMENT OF EUV RADIATION BEAM

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE