Chi-Yang Cheng

Follow

Person

Gloucester, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Enhanced substrate temperature measurement apparatus, system and me...
- Patent number 11,473,978
- Issue date Oct 18, 2022
- Applied Materials, Inc.
- Dawei Sun
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Model-Based Controlled Load Lock Pumping Scheme
- Publication number 20230138326
- Publication date May 4, 2023
- Applied Materials, Inc.
- D. Jeffrey Lischer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENHANCED SUBSTRATE TEMPERATURE MEASUREMENT APPARATUS, SYSTEM AND ME...
- Publication number 20200378837
- Publication date Dec 3, 2020
- Applied Materials, Inc.
- Dawei Sun
- G01 - MEASURING TESTING