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Chia-Chun WANG

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  • Fremont, CA, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Selective atomic layer etching
    • Patent number 10,847,375
    • Issue date Nov 24, 2020
    • Lam Research Corporation
    • Chia-Chun Wang
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Porous low-k dielectric etch
    • Patent number 10,361,091
    • Issue date Jul 23, 2019
    • Lam Research Corporation
    • Eric Hudson
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    SELECTIVE ATTACHMENT TO ENHANCE SiO2:SiNx ETCH SELECTIVITY
    • Publication number 20220362803
    • Publication date Nov 17, 2022
    • LAM RESEARCH CORPORATION
    • Eric A. Hudson
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    SELECTIVE ATOMIC LAYER ETCHING
    • Publication number 20190393046
    • Publication date Dec 26, 2019
    • LAM RESEARCH CORPORATION
    • Chia-Chun WANG
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    POROUS LOW-K DIELECTRIC ETCH
    • Publication number 20180350618
    • Publication date Dec 6, 2018
    • LAM RESEARCH CORPORATION
    • Eric HUDSON
    • H01 - BASIC ELECTRIC ELEMENTS