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Patents Grants
last 30 patents
Information
Patent Grant
Non-thermal soft plasma cleaning
Patent number
10,672,592
Issue date
Jun 2, 2020
Chia Sern Chan
B08 - CLEANING
Information
Patent Grant
Apparatus and method for determining the type, density and temperat...
Patent number
9,930,766
Issue date
Mar 27, 2018
Nanyang Technological University
Chia Sern Chan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Capacitively coupled electrodeless plasma apparatus and a method us...
Patent number
9,837,562
Issue date
Dec 5, 2017
Nanyang Technological University
Shuyan Xu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
Non-Thermal Soft Plasma Cleaning
Publication number
20180019106
Publication date
Jan 18, 2018
Chia Sern CHAN
B08 - CLEANING
Information
Patent Application
AN APPARATUS AND METHOD FOR DIAGNOSTICS OF NETURAL RADICALS IN PLASMA
Publication number
20160198558
Publication date
Jul 7, 2016
Chia Sern CHAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
P-TYPE DOPANT AND METHOD FOR P-TYPE DOPING OF A SEMICONDUCTOR
Publication number
20150372160
Publication date
Dec 24, 2015
Nanyang Technological University
Chia Sern CHAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CAPACITIVELY COUPLED ELECTRODELESS PLASMA APPARATUS AND A METHOD US...
Publication number
20150372167
Publication date
Dec 24, 2015
Nanyang Technological University
Shuyan XU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...