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Chia-Shiung Tsia
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Hsin-chu, TW
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Patents Grants
last 30 patents
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Patent Grant
Method to preserve alignment mark optical integrity
Patent number
6,803,291
Issue date
Oct 12, 2004
Taiwan Semiconductor Manufacturing Co., Ltd
Shih-Chi Fu
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method of forming planarized coatings on contact hole patterns of v...
Patent number
6,645,851
Issue date
Nov 11, 2003
Taiwan Semiconductor Manufacturing Company
Chia-Tung Ho
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
METHOD TO PRESERVE ALIGNMENT MARK OPTICAL INTEGRITY
Publication number
20040185637
Publication date
Sep 23, 2004
Taiwan Semiconductor Manufacturing Co., Ltd.,
Shih-Chi Fu
H01 - BASIC ELECTRIC ELEMENTS