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Chiaki Hatsuda
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Tokyo, JP
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last 30 patents
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Patent Grant
Phase shift mask and method of producing the same
Patent number
5,972,543
Issue date
Oct 26, 1999
Dai Nippon Printing Co., Ltd.
Toshifumi Yokoyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Phase shift mask and method of producing the same
Patent number
5,811,208
Issue date
Sep 22, 1998
Dai Nippon Printing Co., Ltd.
Toshifumi Yokoyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY