Chiaki SATO

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Utsunomiya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Lithography apparatus including display unit for updating data and...
- Patent number 9,053,548
- Issue date Jun 9, 2015
- Canon Kabushiki Kaisha
- Chiaki Sato
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
DRAWING SYSTEM, DRAWING METHOD AND ARTICLE MANUFACTURING METHOD
- Publication number 20150279309
- Publication date Oct 1, 2015
- Canon Kabushiki Kaisha
- Chiaki Sato
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
LITHOGRAPHY APPARATUS AND ARTICLE MANUFACTURING METHOD USING SAME
- Publication number 20140065548
- Publication date Mar 6, 2014
- Canon Kabushiki Kaisha
- Chiaki SATO
- B82 - NANO-TECHNOLOGY