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Chian-Hun Lai
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Taichung City, TW
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Patents Grants
last 30 patents
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Patent Grant
Method for repairing opaque defects on semiconductor mask reticles
Patent number
7,223,503
Issue date
May 29, 2007
Taiwan Semiconductor Manufacturing Company
Wei-Lian Lin
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Novel organic remover for advanced reticle contamination cleaning
Publication number
20070066071
Publication date
Mar 22, 2007
Taiwan Semiconductor Manufacturing Company, Ltd.
Chia-Hsien Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Reticle film stabilizing method
Publication number
20050260503
Publication date
Nov 24, 2005
Taiwan Semiconductor Manufacturing Co., Ltd.
Wei-Lian Lin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for repairing opaque defects on semiconductor mask reticles
Publication number
20050146715
Publication date
Jul 7, 2005
Wei-Lian Lin
G01 - MEASURING TESTING