Chiao-Hua Cheng

Person

Hsinchu, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Method and system for generating droplets for EUV photolithography...
- Patent number 12,167,526
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Kuang Sun
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for using radiation source apparatus
- Patent number 12,096,543
- Issue date Sep 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chiao-Hua Cheng
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Inspection tool for an extreme ultraviolet radiation source to obse...
- Patent number 12,066,761
- Issue date Aug 20, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chiao-Hua Cheng
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Droplet generator assembly and method of replacing components
- Patent number 12,063,734
- Issue date Aug 13, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Kuang Sun
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Inspection system for extreme ultraviolet (EUV) light source
- Patent number 11,567,415
- Issue date Jan 31, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chiao-Hua Cheng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Radiation source apparatus and method for using the same
- Patent number 11,553,581
- Issue date Jan 10, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chiao-Hua Cheng
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor processing tool and methods of operation
- Patent number 11,537,053
- Issue date Dec 27, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chiao-Hua Cheng
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for supplying target material in an EUV light source
- Patent number 11,533,799
- Issue date Dec 20, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Hsin-Feng Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for generating droplets for EUV photolithography...
- Patent number 11,528,797
- Issue date Dec 13, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Kuang Sun
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
EUV photolithography system and methods of operating the same
- Patent number 11,442,365
- Issue date Sep 13, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Kuang Sun
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
DROPLET GENERATOR ASSEMBLY AND METHOD OF REPLACING COMPONENTS
- Publication number 20240365460
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Kuang SUN
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
NOVEL DESIGN OF AN INSPECTION TOOL FOR AN EXTREME ULTRAVIOLET RADIA...
- Publication number 20240361701
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chiao-Hua CHENG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DROPLET GENERATOR ASSEMBLY AND METHOD OF REPLACING COMPONENTS
- Publication number 20240365461
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Kuang SUN
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD AND APPARATUS FOR MONITORING AN EXTREME ULTRAVIOLET RADIATIO...
- Publication number 20230345610
- Publication date Oct 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Kuang SUN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND SYSTEM FOR GENERATING DROPLETS FOR EUV PHOTOLITHOGRAPHY...
- Publication number 20230189422
- Publication date Jun 15, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Kuang SUN
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD FOR USING RADIATION SOURCE APPARATUS
- Publication number 20230164901
- Publication date May 25, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chiao-Hua CHENG
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
INSPECTION SYSTEM FOR EXTREME ULTRAVIOLET (EUV) LIGHT SOURCE
- Publication number 20230142835
- Publication date May 11, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chiao-Hua Cheng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
NOVEL DESIGN OF AN INSPECTION TOOL FOR AN EXTREME ULTRAVIOLET RADIA...
- Publication number 20230067967
- Publication date Mar 2, 2023
- Chiao-Hua CHENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR SUPPLYING TARGET MATERIAL IN AN EUV LIGHT SOURCE
- Publication number 20230010810
- Publication date Jan 12, 2023
- Taiwan Semiconductor Manufacturing company Ltd.
- HSIN-FENG CHEN
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SEMICONDUCTOR SYSTEM INSPECTION TOOL AND METHODS OF OPERATION
- Publication number 20220408538
- Publication date Dec 22, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jou-Hsuan LU
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
- Publication number 20220365442
- Publication date Nov 17, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Chiao-Hua CHENG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND SYSTEM FOR GENERATING DROPLETS FOR EUV PHOTOLITHOGRAPHY...
- Publication number 20220338334
- Publication date Oct 20, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Kuang SUN
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
DROPLET GENERATOR ASSEMBLY AND METHOD OF REPLACING COMPONENTS
- Publication number 20220338335
- Publication date Oct 20, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Kuang SUN
- G05 - CONTROLLING REGULATING
Information Patent Application
INSPECTION SYSTEM FOR EXTREME ULTRAVIOLET (EUV) LIGHT SOURCE
- Publication number 20220326624
- Publication date Oct 13, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chiao-Hua Cheng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
RADIATION SOURCE APPARATUS AND METHOD FOR USING THE SAME
- Publication number 20220304131
- Publication date Sep 22, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chiao-Hua CHENG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Chiao-Hua Cheng

Person

Patents Grantslast 30 patents

Method and system for generating droplets for EUV photolithography...

Method for using radiation source apparatus

Inspection tool for an extreme ultraviolet radiation source to obse...

Droplet generator assembly and method of replacing components

Inspection system for extreme ultraviolet (EUV) light source

Radiation source apparatus and method for using the same

Semiconductor processing tool and methods of operation

System and method for supplying target material in an EUV light source

Method and system for generating droplets for EUV photolithography...

EUV photolithography system and methods of operating the same

Patents Applicationslast 30 patents

DROPLET GENERATOR ASSEMBLY AND METHOD OF REPLACING COMPONENTS

NOVEL DESIGN OF AN INSPECTION TOOL FOR AN EXTREME ULTRAVIOLET RADIA...

DROPLET GENERATOR ASSEMBLY AND METHOD OF REPLACING COMPONENTS

METHOD AND APPARATUS FOR MONITORING AN EXTREME ULTRAVIOLET RADIATIO...

METHOD AND SYSTEM FOR GENERATING DROPLETS FOR EUV PHOTOLITHOGRAPHY...

METHOD FOR USING RADIATION SOURCE APPARATUS

INSPECTION SYSTEM FOR EXTREME ULTRAVIOLET (EUV) LIGHT SOURCE

NOVEL DESIGN OF AN INSPECTION TOOL FOR AN EXTREME ULTRAVIOLET RADIA...

SYSTEM AND METHOD FOR SUPPLYING TARGET MATERIAL IN AN EUV LIGHT SOURCE

SEMICONDUCTOR SYSTEM INSPECTION TOOL AND METHODS OF OPERATION

SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION

METHOD AND SYSTEM FOR GENERATING DROPLETS FOR EUV PHOTOLITHOGRAPHY...

DROPLET GENERATOR ASSEMBLY AND METHOD OF REPLACING COMPONENTS

INSPECTION SYSTEM FOR EXTREME ULTRAVIOLET (EUV) LIGHT SOURCE

RADIATION SOURCE APPARATUS AND METHOD FOR USING THE SAME