Chiara Helena Catherina Giammanco MACPHERSON

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method for conditioning a plasma processing chamber
- Patent number 12,060,636
- Issue date Aug 13, 2024
- Lam Research Corporation
- Chiara Helena Catherina Giammanco MacPherson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
MOVEABLE EDGE RINGS WITH REDUCED CAPACITANCE VARIATION FOR SUBSTRAT...
- Publication number 20220254612
- Publication date Aug 11, 2022
- LAM RESEARCH CORPORATION
- Christopher KIMBALL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CONDITIONING A PLASMA PROCESSING CHAMBER
- Publication number 20210340668
- Publication date Nov 4, 2021
- LAM RESEARCH CORPORATION
- Chiara Helena Catherina Giammanco MACPHERSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...