Chie Shishido

Person

Kawasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Scanning electron microscope
- Patent number 10,186,399
- Issue date Jan 22, 2019
- Hitachi High-Technologies Corporation
- Mayuka Osaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope system, pattern measurement method usi...
- Patent number 9,852,881
- Issue date Dec 26, 2017
- Hitachi High-Technologies Corporation
- Chie Shishido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern dimension measurement method using electron microscope, pat...
- Patent number 9,671,223
- Issue date Jun 6, 2017
- Hitachi High-Technologies Corporation
- Chie Shishido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern evaluation method and pattern evaluation device
- Patent number 9,488,815
- Issue date Nov 8, 2016
- Hitachi High-Technologies Corporation
- Atsushi Miyamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Shape measurement method, and system therefor
- Patent number 9,354,049
- Issue date May 31, 2016
- HUTACHI HIGH-TECHNOLOGIES CORPORATION
- Chie Shishido
- G01 - MEASURING TESTING
Information Patent Grant
Pattern inspection device and pattern inspection method
- Patent number 9,188,554
- Issue date Nov 17, 2015
- Hitachi High-Technologies Corporation
- Chie Shishido
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam device and a method of improving image qualit...
- Patent number 9,019,362
- Issue date Apr 28, 2015
- Hitachi High-Technologies Corporation
- Jie Bai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Defect inspection method and defect inspection apparatus
- Patent number 8,953,868
- Issue date Feb 10, 2015
- Hitachi High-Technologies Corporation
- Shinya Murakami
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Estimating shape based on comparison between actual waveform and li...
- Patent number 8,671,366
- Issue date Mar 11, 2014
- Hitachi High-Technologies Corporation
- Maki Tanaka
- G01 - MEASURING TESTING
Information Patent Grant
Electron microscope system and method for evaluating film thickness...
- Patent number 8,502,145
- Issue date Aug 6, 2013
- Hitachi High-Technologies Corporation
- Mayuka Iwasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Tool-to-tool matching control method and its system for scanning el...
- Patent number 8,502,144
- Issue date Aug 6, 2013
- Hitachi High-Technologies Corporation
- Mayuka Oosaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope system and method for measuring dimens...
- Patent number 8,481,936
- Issue date Jul 9, 2013
- Hitachi High-Technologies Corporation
- Chie Shishido
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Charged particle beam device
- Patent number 8,357,897
- Issue date Jan 22, 2013
- Hitachi High-Technologies Corporation
- Chie Shishido
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting defect of pattern formed on sem...
- Patent number 8,331,651
- Issue date Dec 11, 2012
- Hitachi High-Technologies Corporatiopn
- Tomofumi Nishiura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Electron microscope system and method for evaluating film thickness...
- Patent number 8,217,348
- Issue date Jul 10, 2012
- Hitachi High-Technologies Corporation
- Mayuka Iwasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Charged particle beam apparatus and methods for capturing images us...
- Patent number 8,207,512
- Issue date Jun 26, 2012
- Hitachi High-Technologies Corporation
- Chie Shishido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope system and method for measuring dimens...
- Patent number 8,110,800
- Issue date Feb 7, 2012
- Hitachi High-Technologies Corporation
- Chie Shishido
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Defect inspection method and apparatus
- Patent number 8,107,717
- Issue date Jan 31, 2012
- Hitachi, Ltd.
- Shunji Maeda
- G01 - MEASURING TESTING
Information Patent Grant
Method and system of displaying an exposure condition
- Patent number 8,095,896
- Issue date Jan 10, 2012
- Hitachi High-Technologies Corporation
- Hirohito Koike
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for inspecting defect of pattern formed on sem...
- Patent number 8,045,789
- Issue date Oct 25, 2011
- Hitachi High-Technologies Corporaiton
- Tomofumi Nishiura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Sample and method for evaluating resolution of scanning electron mi...
- Patent number 8,022,356
- Issue date Sep 20, 2011
- Hitachi High-Technologies Corporation
- Mayuka Oosaki
- G01 - MEASURING TESTING
Information Patent Grant
Tool-to-tool matching control method and its system for scanning el...
- Patent number 8,003,940
- Issue date Aug 23, 2011
- Hitachi High-Technologies Corporation
- Mayuka Oosaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern inspection method and apparatus
- Patent number 7,957,579
- Issue date Jun 7, 2011
- Hitachi, Ltd.
- Takashi Hiroi
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection method and apparatus
- Patent number 7,916,929
- Issue date Mar 29, 2011
- Hitachi, Ltd.
- Shunji Maeda
- G01 - MEASURING TESTING
Information Patent Grant
Pattern inspection method and apparatus
- Patent number 7,894,658
- Issue date Feb 22, 2011
- Hitachi, Ltd.
- Takashi Hiroi
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for measuring dimension using electron microscope
- Patent number 7,817,860
- Issue date Oct 19, 2010
- Hitachi High-Technologies Corporation
- Chie Shishido
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam apparatus and methods for capturing images us...
- Patent number 7,807,980
- Issue date Oct 5, 2010
- Hitachi High-Technologies Corporation
- Chie Shishido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for measuring a pattern dimension using a scanning electron...
- Patent number 7,732,761
- Issue date Jun 8, 2010
- Hitachi High-Technologies Corporation
- Maki Tanaka
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for monitoring exposure process
- Patent number 7,685,560
- Issue date Mar 23, 2010
- Hitachi High-Technologies Corporation
- Wataru Nagatomo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for measuring pattern dimensions
- Patent number 7,633,061
- Issue date Dec 15, 2009
- Hitachi High-Technologies Corporation
- Maki Tanaka
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20170301513
- Publication date Oct 19, 2017
- Hitachi High-Technologies Corporation
- Mayuka OSAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scanning Electron Microscope System, Pattern Measurement Method Usi...
- Publication number 20160379798
- Publication date Dec 29, 2016
- Hitachi High-Technologies Corporation
- Chie SHISHIDO
- G01 - MEASURING TESTING
Information Patent Application
Charged Particle Microscope System and Measurement Method Using Same
- Publication number 20150235804
- Publication date Aug 20, 2015
- Hitachi High-Technologies Corporation
- Mayuka Osaki
- G02 - OPTICS
Information Patent Application
PATTERN INSPECTION DEVICE AND PATTERN INSPECTION METHOD
- Publication number 20150212019
- Publication date Jul 30, 2015
- Hitachi High-Technologies Corporation
- Chie Shishido
- G01 - MEASURING TESTING
Information Patent Application
PATTERN EVALUATION METHOD AND PATTERN EVALUATION DEVICE
- Publication number 20140320627
- Publication date Oct 30, 2014
- Atsushi Miyamoto
- G02 - OPTICS
Information Patent Application
DEFECT INSPECTION METHOD AND DEFECT INSPECTION APPARATUS
- Publication number 20130322737
- Publication date Dec 5, 2013
- Hitachi High-Technologies Corporation
- Shinya MURAKAMI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SHAPE MEASUREMENT METHOD, AND SYSTEM THEREFOR
- Publication number 20130262027
- Publication date Oct 3, 2013
- Chie Shishido
- G01 - MEASURING TESTING
Information Patent Application
Pattern Dimension Measurement Method Using Electron Microscope, Pat...
- Publication number 20130166240
- Publication date Jun 27, 2013
- Hitachi High-Technologies Corporation
- Chie Shishido
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE BEAM DEVICE AND A METHOD OF IMPROVING IMAGE QUALIT...
- Publication number 20120274757
- Publication date Nov 1, 2012
- Jie Bai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON MICROSCOPE SYSTEM AND METHOD FOR EVALUATING FILM THICKNESS...
- Publication number 20120267529
- Publication date Oct 25, 2012
- Mayuka Iwasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Pattern Shape Estimation Method and Pattern Measuring Device
- Publication number 20120151428
- Publication date Jun 14, 2012
- Hitachi High-Technologies Corporation
- Maki Tanaka
- G01 - MEASURING TESTING
Information Patent Application
PATTERN SHAPE SELECTION METHOD AND PATTERN MEASURING DEVICE
- Publication number 20120126116
- Publication date May 24, 2012
- Hitachi High-Technologies Corporation
- Maki Tanaka
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION METHOD AND APPARATUS
- Publication number 20120128230
- Publication date May 24, 2012
- Shunji Maeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SCANNING ELECTRON MICROSCOPE SYSTEM AND METHOD FOR MEASURING DIMENS...
- Publication number 20120112067
- Publication date May 10, 2012
- Chie Shishido
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20120104254
- Publication date May 3, 2012
- Chie Shishido
- G01 - MEASURING TESTING
Information Patent Application
Method and Apparatus For Inspecting Defect Of Pattern Formed On Sem...
- Publication number 20120002861
- Publication date Jan 5, 2012
- Tomofumi NISHIURA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Tool-To-Tool Matching Control Method And Its System For Scanning El...
- Publication number 20110278453
- Publication date Nov 17, 2011
- Mayuka Oosaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR EVALUATING SUPERIMPOSITION OF PATTERN
- Publication number 20110268363
- Publication date Nov 3, 2011
- Mayuka Osaki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT INSPECTION METHOD AND APPARATUS
- Publication number 20110170765
- Publication date Jul 14, 2011
- Shunji Maeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CHARGED PARTICEL BEAM APPARATUS AND METHODS FOR CAPTURING IMAGES US...
- Publication number 20110133080
- Publication date Jun 9, 2011
- Chie Shishido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pattern Inspection Method And Apparatus
- Publication number 20100246933
- Publication date Sep 30, 2010
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Sample and method for evaluating resolution of scanning electron mi...
- Publication number 20100133426
- Publication date Jun 3, 2010
- Mayuka Oosaki
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR MEASURING DIMENSION USING ELECTRON MICROSCOPE
- Publication number 20090224152
- Publication date Sep 10, 2009
- Chie Shishido
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT INSPECTION METHOD AND APPARATUS
- Publication number 20090214102
- Publication date Aug 27, 2009
- Shunji Maeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Electron Microscope System and Method for Evaluating Film Thickness...
- Publication number 20090212211
- Publication date Aug 27, 2009
- Hitachi High-Technologies Corporation
- Mayuka IWASAKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Scanning Electron Microscope system and Method for Measuring Dimens...
- Publication number 20090212212
- Publication date Aug 27, 2009
- Chie Shishido
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SCANNING ELECTRON MICROSCOPE AND METHOD OF MEASURING PATTERN DIMENS...
- Publication number 20090212215
- Publication date Aug 27, 2009
- Hitachi High-Technologies Corporation
- Wataru Nagatomo
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR MEASURING A PATTERN DIMENSION
- Publication number 20090214103
- Publication date Aug 27, 2009
- Hitachi High-Technologies Corporation
- Maki Tanaka
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR INSPECTING DEFECT OF PATTERN FORMED ON SEM...
- Publication number 20090208090
- Publication date Aug 20, 2009
- Tomofumi NISHIURA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Tool-To-Tool Matching Control Method And its System For Scanning El...
- Publication number 20090121134
- Publication date May 14, 2009
- Mayuka Oosaki
- H01 - BASIC ELECTRIC ELEMENTS

Chie Shishido

Person

Patents Grantslast 30 patents

Scanning electron microscope

Scanning electron microscope system, pattern measurement method usi...

Pattern dimension measurement method using electron microscope, pat...

Pattern evaluation method and pattern evaluation device

Shape measurement method, and system therefor

Pattern inspection device and pattern inspection method

Charged particle beam device and a method of improving image qualit...

Defect inspection method and defect inspection apparatus

Estimating shape based on comparison between actual waveform and li...

Electron microscope system and method for evaluating film thickness...

Tool-to-tool matching control method and its system for scanning el...

Scanning electron microscope system and method for measuring dimens...

Charged particle beam device

Method and apparatus for inspecting defect of pattern formed on sem...

Electron microscope system and method for evaluating film thickness...

Charged particle beam apparatus and methods for capturing images us...

Scanning electron microscope system and method for measuring dimens...

Defect inspection method and apparatus

Method and system of displaying an exposure condition

Method and apparatus for inspecting defect of pattern formed on sem...

Sample and method for evaluating resolution of scanning electron mi...

Tool-to-tool matching control method and its system for scanning el...

Pattern inspection method and apparatus

Defect inspection method and apparatus

Pattern inspection method and apparatus

Method and apparatus for measuring dimension using electron microscope

Charged particle beam apparatus and methods for capturing images us...

Method for measuring a pattern dimension using a scanning electron...

Method and apparatus for monitoring exposure process

Method and apparatus for measuring pattern dimensions

Patents Applicationslast 30 patents

SCANNING ELECTRON MICROSCOPE

Scanning Electron Microscope System, Pattern Measurement Method Usi...

Charged Particle Microscope System and Measurement Method Using Same

PATTERN INSPECTION DEVICE AND PATTERN INSPECTION METHOD

PATTERN EVALUATION METHOD AND PATTERN EVALUATION DEVICE

DEFECT INSPECTION METHOD AND DEFECT INSPECTION APPARATUS

SHAPE MEASUREMENT METHOD, AND SYSTEM THEREFOR

Pattern Dimension Measurement Method Using Electron Microscope, Pat...

CHARGED PARTICLE BEAM DEVICE AND A METHOD OF IMPROVING IMAGE QUALIT...

ELECTRON MICROSCOPE SYSTEM AND METHOD FOR EVALUATING FILM THICKNESS...

Pattern Shape Estimation Method and Pattern Measuring Device

PATTERN SHAPE SELECTION METHOD AND PATTERN MEASURING DEVICE

DEFECT INSPECTION METHOD AND APPARATUS

SCANNING ELECTRON MICROSCOPE SYSTEM AND METHOD FOR MEASURING DIMENS...

CHARGED PARTICLE BEAM DEVICE

Method and Apparatus For Inspecting Defect Of Pattern Formed On Sem...

Tool-To-Tool Matching Control Method And Its System For Scanning El...

METHOD FOR EVALUATING SUPERIMPOSITION OF PATTERN

DEFECT INSPECTION METHOD AND APPARATUS

CHARGED PARTICEL BEAM APPARATUS AND METHODS FOR CAPTURING IMAGES US...

Pattern Inspection Method And Apparatus

Sample and method for evaluating resolution of scanning electron mi...

METHOD AND APPARATUS FOR MEASURING DIMENSION USING ELECTRON MICROSCOPE

DEFECT INSPECTION METHOD AND APPARATUS

Electron Microscope System and Method for Evaluating Film Thickness...

Scanning Electron Microscope system and Method for Measuring Dimens...

SCANNING ELECTRON MICROSCOPE AND METHOD OF MEASURING PATTERN DIMENS...

METHOD FOR MEASURING A PATTERN DIMENSION

METHOD AND APPARATUS FOR INSPECTING DEFECT OF PATTERN FORMED ON SEM...

Tool-To-Tool Matching Control Method And its System For Scanning El...