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Shan Chung City, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Semiconductor device having high-κ dielectric layer and method for...
Patent number
11,201,055
Issue date
Dec 14, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Chien-Hua Fu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dual damascene process flow for porous low-k materials
Patent number
7,538,025
Issue date
May 26, 2009
Taiwan Semiconductor Manufacturing Company
Chao-Cheng Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Via structures and trench structures and dual damascene structures
Patent number
7,436,009
Issue date
Oct 14, 2008
Taiwan Semiconductor Manufacturing Company, Ltd.
Yi-Chen Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Via hole and trench structures and fabrication methods thereof and...
Patent number
7,217,663
Issue date
May 15, 2007
Taiwan Semiconductor Manufacturing Company
Yi-Chen Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chemistry for liner removal in a dual damascene process
Patent number
6,809,028
Issue date
Oct 26, 2004
Taiwan Semiconductor Manufacturing Company, Ltd.
Chao-Cheng Chen
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SEMICONDUCTOR DEVICE HAVING HIGH-K DIELECTRIC LAYER AND METHOD FOR...
Publication number
20180151356
Publication date
May 31, 2018
Taiwan Semiconductor Manufacturing Co., Ltd.
Chien-Hua FU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Via structures and trench structures and dual damascene structures
Publication number
20070184669
Publication date
Aug 9, 2007
Taiwan Semiconductor Manufacturing Company, Ltd.
Yi-Chen Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Via hole and trench structures and fabrication methods thereof and...
Publication number
20060160362
Publication date
Jul 20, 2006
Taiwan Semiconductor Manufacturing Co., Ltd.
Yi-Chen Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Dual damascene process flow for porous low-k materials
Publication number
20050106856
Publication date
May 19, 2005
Taiwan Semiconductor Manufacturing Co.
Chao-Cheng Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Chemistry for liner removal in a dual damascene process
Publication number
20040082164
Publication date
Apr 29, 2004
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
Chao-Cheng Chen
H01 - BASIC ELECTRIC ELEMENTS