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Chien-Fu Chu
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Hsinchu City, TW
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Patents Grants
last 30 patents
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Patent Grant
Method of cleaning reaction chamber, method of forming protection f...
Patent number
7,732,009
Issue date
Jun 8, 2010
United Microelectronics Corp.
Chih-Jen Mao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
METHOD OF CLEANING REACTION CHAMBER, METHOD OF FORMING PROTECTION F...
Publication number
20080075852
Publication date
Mar 27, 2008
United Microelectronics Corp.
Chih-Jen Mao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...