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Chien-Yao Kao
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Kaohsiung city, TW
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Patents Grants
last 30 patents
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Patent Grant
Method for calibrating alignment mark positions on substrates
Patent number
7,089,677
Issue date
Aug 15, 2006
Taiwan Semiconductor Manufacturing Co., Ltd.
Ching-Shan Lu
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Method for calibrating alignment mark positions on substrates
Publication number
20050246915
Publication date
Nov 10, 2005
Taiwan Semiconductor Manufacturing Co., Ltd.
Ching-Shan Lu
H01 - BASIC ELECTRIC ELEMENTS