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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,501,976
Issue date
Nov 15, 2022
Tokyo Electron Limited
Seiichi Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of forming integrated circuits with solutions to interlayer...
Patent number
10,566,441
Issue date
Feb 18, 2020
GLOBALFOUNDRIES Singapore Pte. Ltd.
Hao Nong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated circuit system including nitride layer technology
Patent number
8,283,263
Issue date
Oct 9, 2012
GLOBALFOUNDRIES Singapore Pte. Ltd.
Sripad Sheshagiri Nagarad
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming almost L-shaped spacer for improved ILD gap fill
Patent number
6,632,745
Issue date
Oct 14, 2003
Chartered Semiconductor Manufacturing Ltd.
Chiew Wah Yap
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selective etch method for selectively etching a multi-layer stack l...
Patent number
6,521,539
Issue date
Feb 18, 2003
Chartered Semiconductor Manufacturing Ltd.
Mei Sheng Zhou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming an L-shaped spacer with a disposable organic top...
Patent number
6,294,480
Issue date
Sep 25, 2001
Chartered Semiconductor Manufacturing Ltd.
Yelehanka Ramachandramurthy Pradeep
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20210265170
Publication date
Aug 26, 2021
TOKYO ELECTRON LIMITED
Seiichi WATANABE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF FORMING INTEGRATED CIRCUITS WITH SOLUTIONS TO INTERLAYER...
Publication number
20190252515
Publication date
Aug 15, 2019
GLOBALFOUNDRIES SINGAPORE PTE. LTD.
Hao Nong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR FABRICATING INTEGRATED CIRCUITS WITH NONVOLATILE MEMORY...
Publication number
20150349095
Publication date
Dec 3, 2015
GLOBALFOUNDRIES Singapore Pte. Ltd.
Chiew Wah Yap
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTEGRATED CIRCUIT SYSTEM INCLUDING NITRIDE LAYER TECHNOLOGY
Publication number
20130034954
Publication date
Feb 7, 2013
GLOBALFOUNDRIES SINGAPORE PTE. LTD.
Sripad Sheshagiri Nagarad
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTEGRATED CIRCUIT SYSTEM INCLUDING NITRIDE LAYER TECHNOLOGY
Publication number
20080032513
Publication date
Feb 7, 2008
Chartered Semiconductor Manufacturing LTD.
Sripad Sheshagiri Nagarad
H01 - BASIC ELECTRIC ELEMENTS