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Chih Chung
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San Jose, CA, US
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last 30 patents
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Patent Grant
Temperature-based assymetry correction during CMP and nozzle for me...
Patent number
11,697,187
Issue date
Jul 11, 2023
Applied Materials, Inc.
Haosheng Wu
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
TEMPERATURE-BASED IN-SITU EDGE ASSYMETRY CORRECTION DURING CMP
Publication number
20200331114
Publication date
Oct 22, 2020
Applied Materials, Inc.
Haosheng Wu
B24 - GRINDING POLISHING
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Patent Application
TEMPERATURE-BASED ASSYMETRY CORRECTION DURING CMP AND NOZZLE FOR ME...
Publication number
20200331117
Publication date
Oct 22, 2020
Applied Materials, Inc.
Haosheng Wu
H01 - BASIC ELECTRIC ELEMENTS