Chih-Hsuan Chen

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Hsin-chu-shi, TW

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 9,953,862
- Issue date Apr 24, 2018
- Tokyo Electron Limited
- Akitoshi Harada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 9,209,041
- Issue date Dec 8, 2015
- Tokyo Electron Limited
- Akitoshi Harada
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20160315005
- Publication date Oct 27, 2016
- TOKYO ELECTRON LIMITED
- Akitoshi Harada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20150221522
- Publication date Aug 6, 2015
- Tokyo Electron Limited
- Akitoshi Harada
- H01 - BASIC ELECTRIC ELEMENTS