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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES
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Publication number 20230378003
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Publication date Nov 23, 2023
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TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
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Li-Chao YIN
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Noise Reduction for Overlay Control
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Publication number 20200310255
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Publication date Oct 1, 2020
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Taiwan Semiconductor Manufacturing Co., LTD
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Weimin Hu
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Method and System for Overlay Control
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Publication number 20200124984
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Publication date Apr 23, 2020
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Yang-Hung Chang
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G06 - COMPUTING CALCULATING COUNTING
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Noise Reduction for Overlay Control
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Publication number 20190258179
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Publication date Aug 22, 2019
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Taiwan Semiconductor Manufacturing Co., LTD
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Weimin Hu
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Aperture Design and Methods Thereof
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Publication number 20190004220
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Publication date Jan 3, 2019
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Hung-Chih Hsieh
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Method and System for Overlay Control
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Publication number 20180329313
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Publication date Nov 15, 2018
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Yang-Hung Chang
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Noise Reduction for Overlay Control
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Publication number 20180173110
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Publication date Jun 21, 2018
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Weimin Hu
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Spectroscopic Overlay Metrology
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Publication number 20180172514
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Publication date Jun 21, 2018
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Kai Wu
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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METHOD OF EXTRACTING DEFECTS
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Publication number 20170345725
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Publication date Nov 30, 2017
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Taiwan Semiconductor Manufacturing Co., LTD
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Jia-Rui HU
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G01 - MEASURING TESTING
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LIGHT-EMITTING ELEMENT
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Publication number 20160315221
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Publication date Oct 27, 2016
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EPISTAR CORPORATION
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Po Yuan CHEN
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H01 - BASIC ELECTRIC ELEMENTS
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Method and System For Overlay Control
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Publication number 20150268564
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Publication date Sep 24, 2015
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Yang-Hung Chang
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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LIGHT-EMITTING DEVICE
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Publication number 20150243845
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Publication date Aug 27, 2015
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EPISTAR CORPORATION
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Peng-Ren CHEN
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H01 - BASIC ELECTRIC ELEMENTS
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Method and System for Overlay Control
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Publication number 20150067617
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Publication date Mar 5, 2015
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Yang-Hung Chang
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G06 - COMPUTING CALCULATING COUNTING
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Two-Dimensional Marks
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Publication number 20140253901
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Publication date Sep 11, 2014
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Wen-Zhan Zhou
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Hybrid Focus-Exposure Matrix
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Publication number 20140257761
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Publication date Sep 11, 2014
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Wen-Zhan Zhou
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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