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Chih-shun LU
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Los Altos, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Resonant process monitor
Patent number
11,551,905
Issue date
Jan 10, 2023
Intel Corporation
Yaoling Pan
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
RESONANT PROCESS MONITOR
Publication number
20190287758
Publication date
Sep 19, 2019
Yaoling PAN
H01 - BASIC ELECTRIC ELEMENTS